A method for on-line analysis of methyl chlorosilane by using an online Raman spectrometer to establish a model
A technology of Raman spectrometer and methyl chlorosilane, which is applied in the direction of analyzing materials, analyzing materials through chemical reactions, and instruments, and can solve the problems of lack of detection means, instrument stability and speed that cannot meet the needs of devices, and device materials. To solve problems such as ambiguous direction, achieve fast analysis speed, high reliability of results, and improve the stability of the device
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[0038] A kind of method that adopts online Raman spectrometer to set up a model to analyze methyl chlorosilane online, comprises the following steps:
[0039] 1. Laboratory sample collection:
[0040] The variation range of each composition of the collected samples should be able to cover the actual variation range of the sample to be tested;
[0041] 2. The content of each component in the sample is determined by gas chromatography, and the theoretical value of the model sample is established:
[0042] 2.1 Gas chromatography condition parameters:
[0043] Oven temperature: initial column temperature 50°C, heating rate 5°C / min, final temperature 280°C; vaporization chamber temperature: 250°C; detector temperature: 280°C;
[0044] 2.2 Calculate according to the peak area of the chromatographic peak to obtain the content of each component:
[0045] The calculation formula is: T i =(A i ×100) / ∑A n
[0046] Among them: T i : the percentage content of component i; A i ...
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