Three-dimensional hall sensor for detecting a spatial magnetic field
A Hall sensor, space magnetic field technology, applied in the size/direction of the magnetic field, the geometrical arrangement of the magnetic sensor elements, the measurement of magnetic variables, etc., can solve the problem of lack of symmetry, and achieve the effect of simplifying the connection
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[0049] figure 1 The principle structure of the new magnetic field sensor in its most general design is shown. The magnetic field sensor 100 comprises a conductive substrate 102 which is delimited in the spatial direction by two ideally but not necessarily planar surfaces 104 , 106 , which are ideally but not necessarily oriented parallel to one another. The bounding surfaces 104 , 106 are subsequently referred to as upper or lower bounding surfaces. The conductive structure can be defined in two different spatial directions. At least three interfaces C i (i=1, 2...N, N≥3) and C i’ (i'=1, 2...N', N'≥3 and not necessarily equal to N) are integrated in the upper or lower interface 104, 106, respectively, via which the structure 100 can be electrically manipulated and the magnetic field-dependent Measure the signal.
[0050] During the operation of the magnetic field sensor 100, at the interface C of one of the bounding surfaces 104 i With the second interface C of the oppo...
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