Pixel array of cmos image sensor with tilted optical path
An image sensor and pixel array technology, applied in the field of pixel array, can solve problems such as poor response, and achieve the effects of improved response, improved overall sensitivity, and increased light sensitivity
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Embodiment 1
[0040] In this example, see image 3 , image 3 is a schematic structural diagram of the CMOS image pixel array in Embodiment 1 of the present invention. like image 3 As shown, the pixel array of the CMOS image sensor of the present invention adopts a back-illuminated pixel array, which includes a metal layer 21 , a silicon-based layer 12 , a color filter layer 20 and a microlens layer 19 sequentially facing the direction of incident light. The metal layer 21 is mainly composed of silicon oxide, in which there is a circuit structure 22, which is used to transmit the electrical signal of photoelectric conversion to the peripheral circuit for processing; The photosensitive diode 13 and the light channel 14, the photosensitive diode 13 is used to photoelectrically convert the incident light received, the light channel 14 is used to transmit the incident light; the color filter layer 20 and the microlens layer 19 are used to focus the incident light and obtain a color image. ...
Embodiment 2
[0050] In this example, see Figure 4 , Figure 4 is a schematic structural diagram of the CMOS image pixel array in Embodiment 2 of the present invention. like Figure 4 As shown, the difference from Embodiment 1 is that the optical paths of the eight surrounding pixel units are inclined at the same inclination angle 24 relative to the optical path of the central pixel unit (the hollow arrow in the figure represents the direction of the optical path), that is, the surrounding The pixel units are disposed symmetrically and obliquely toward the inner side of the central pixel unit, forming a trumpet shape facing away from the direction of incident light. The vertices 25 of the respective included angles also intersect at one point, which ensures the symmetry of the inclination directions of the optical paths of the eight surrounding pixel units. The microlenses, color filters, light channels and photosensitive diodes of each surrounding pixel unit are also inclined at the sa...
Embodiment 3
[0052] In this example, see Image 6 , Image 6 is a schematic structural diagram of the CMOS image pixel array in Embodiment 3 of the present invention. like Image 6 As shown, the difference from Embodiment 1 is that the pixel units are arranged in an even number of 4×4 to form a pixel unit group, and the pixel unit group is repeatedly arranged to form a pixel array. What is shown in the figure is the arrangement structure of each of the 4 pixel units located in the second row in the 2 pixel unit groups (the metal layer and the silicon base layer in the pixel unit group are omitted), and each pixel unit group A 2×2 pixel unit is used as a central pixel unit, and other 12 pixel units are arranged around the central pixel unit to form surrounding pixel units. The 4 central pixel units have a vertical optical path parallel to the vertical irradiation direction of the incident light, and the 12 surrounding pixel units have an inclined optical path oblique to the vertical irra...
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