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Method and system for optical evaluation, and optical detector

A technology of optical detector and evaluation system, which is applied in the field of optical evaluation and can solve the problems of random scattering of light and the inability to detect the existence of beam acoustic waves

Inactive Publication Date: 2014-12-10
UNIVERSITY OF NOTTINGHAM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Laser ultrasound, however, is not without its own problems, the main one being that when the sample we want to examine is 'rough' like many engineering parts (here, rough only means underpolished, which is not very good mirror), the light is scattered randomly, and conventional optical techniques will not be able to detect the presence of sound waves passing under the beam

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  • Method and system for optical evaluation, and optical detector
  • Method and system for optical evaluation, and optical detector
  • Method and system for optical evaluation, and optical detector

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Embodiment Construction

[0041] One of the simplest and most effective detectors for detecting ultrasound by laser is the knife edge detector. Knife-edge detectors exploit the fact that sound waves passing through the sample surface move the sample surface. If the beam is directed onto a surface, the light of the beam reflects off the surface and is deflected by a slight angle as the sound waves pass through. Optics, in the form of an array of lenses, convert the deflection into a horizontal beam movement synchronized with the passing acoustic waves, which can then be detected by a photosensitive detector. Beam deflection can be detected using a conventional knife edge, or a split photodiode 2 as shown in FIG. 3 .

[0042] For smooth surfaces, the reflected light is focused to a well-defined specular reflection in the form of disk 4 shown in the left-hand image of Figure 3 (Panel A). As the sound waves pass through, the disk of light moves vertically across the detector. A 'split' detector 2 subtra...

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Abstract

An optical detector 50 comprises a plurality of pixels, each pixel comprising a photodiode operable to detect light incident on that pixel and to generate a signal indicative of an intensity of that light. The plurality of pixels comprises a plurality of pixel pairs, and for each pixel pair, in a configuration mode, the detector is arranged to compare the signal generated by a first pixel of the pair with the signal generated by a second pixel of the pair. The plurality of pixels may comprise an array and the signal indicative of intensity generated by each pixel may be connected to either a first output 52 or a second output 54 depending on the result of the comparison. In an experiment mode, the signals indicative of intensity received at the first output 52 may be summed and those received at the second output 54 may be summed. The difference between the two summed signals may be obtained. The optical detector may be a speckle knife edge detector used in laser ultrasonic evaluation of both rough and smooth surfaces.

Description

technical field [0001] The present invention relates to methods and systems for optical evaluation, and optical detectors for use in such methods and systems. The invention relates particularly, but not exclusively, to the optical detection of ultrasound waves on the surface of a material. Background technique [0002] Ultrasound is widely used to detect material defects, wear, cracks, etc., and has the key advantage of allowing the inspection of optically opaque materials. The problem with traditional (non-laser) ultrasound is that it requires contact sensors to generate and detect ultrasonic waves. This means that the method is not suitable for inaccessible or hazardous environments. Laser hypersonics overcomes these problems by using lasers to generate and detect sound waves. A laser generates sound by heating a sample causing thermal expansion, thereby generating acoustic waves, typically comprising surface acoustic waves (SAW), that propagate across the surface of th...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17G01H9/00H01L27/146
CPCG01H9/00G01N21/1702H01L27/14609G01J1/1626G01N29/2418G01N2201/0612G01N2201/0675
Inventor 史蒂芬·沙普尔斯罗格·莱特
Owner UNIVERSITY OF NOTTINGHAM