Conveyor
A technology for conveying devices and conveying parts, applied in the direction of conveyors, conveyor objects, transportation and packaging, etc., can solve problems such as conflicts, and achieve the effect of preventing conflicts
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[0024] Hereinafter, some exemplary embodiments of the present invention will be described with reference to the drawings.
[0025] The conveyance device according to the embodiment of the present invention can be suitably used for conveying a thin object such as a glass substrate in a clean room, for example. In the case of a glass substrate, not only a substrate with a thickness of about 0.7 mm but also an extremely thin substrate with a thickness of about 0.1 to 0.3 mm can be used.
[0026] refer to figure 1 , The conveyance device 100 according to one embodiment of the present invention includes a levitation unit 116 that levitates the workpiece W (object), and a conveyance unit 120 that drives the workpiece W in the direction X (first direction). The levitation portion 116 has an opening 116 a for ejecting gas, and the ejected gas applies a positive pressure to the workpiece W, so that the workpiece W is suspended. The transport unit 120 includes a plurality of protrusio...
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