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Conveyor

A technology for conveying devices and conveying parts, applied in the direction of conveyors, conveyor objects, transportation and packaging, etc., can solve problems such as conflicts, and achieve the effect of preventing conflicts

Active Publication Date: 2016-07-27
IHI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There is a problem that the front end is easy to conflict with the roller or the conveying device

Method used

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Examples

Experimental program
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Embodiment Construction

[0024] Hereinafter, some exemplary embodiments of the present invention will be described with reference to the drawings.

[0025] The conveyance device according to the embodiment of the present invention can be suitably used for conveying a thin object such as a glass substrate in a clean room, for example. In the case of a glass substrate, not only a substrate with a thickness of about 0.7 mm but also an extremely thin substrate with a thickness of about 0.1 to 0.3 mm can be used.

[0026] refer to figure 1 , The conveyance device 100 according to one embodiment of the present invention includes a levitation unit 116 that levitates the workpiece W (object), and a conveyance unit 120 that drives the workpiece W in the direction X (first direction). The levitation portion 116 has an opening 116 a for ejecting gas, and the ejected gas applies a positive pressure to the workpiece W, so that the workpiece W is suspended. The transport unit 120 includes a plurality of protrusio...

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PUM

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Abstract

A conveying device for suspending an object by gas and conveying it in a first direction, comprising: a levitation unit that sprays the gas to pressurize the object to suspend the object; a conveying unit that includes a belt and a plurality of At least one of the rollers, the belt is an endless belt extending in the above-mentioned first direction, and is provided with a plurality of protrusions protruding in contact with the above-mentioned object, the plurality of rollers are rotatable in the above-mentioned first direction, and The above-mentioned first direction is arranged, and the above-mentioned conveying part is configured to be driven in the above-mentioned first direction in contact with the above-mentioned object; a cover, which covers the above-mentioned conveying part, or extends in parallel adjacent to the above-mentioned conveying device, and only makes the plurality of protrusions Or each of the plurality of rollers protrudes from its upper end and has a surface parallel to the lower surface of the object; and a suction unit that applies negative pressure to the inside of the cover to bring the object into contact with the conveyance unit.

Description

technical field [0001] The present invention relates to a transport device for transporting a substrate such as thin glass in suspension. Background technique [0002] In the manufacture of flat panel displays typified by liquid crystal displays, in order to transport substrates such as thin glass without damage, a transport device that transports the substrate by suspending it is used. Such a transport device generally includes a levitation device that ejects compressed air, and a belt conveyor or a roller conveyor that contacts the suspended substrate and provides driving force thereto. [0003] Dust adhering to the glass substrate and scratches on the surface have a significant impact on the quality of the display. One of the main causes of dust adhesion and scratches on the surface is that the glass substrate comes into contact with conveyance equipment and the like. On the other hand, since the glass substrate has a thickness of, for example, 0.7 mm or less, it is fle...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G49/06H01L21/677
CPCB65G49/065B65G2249/045H01L21/67784
Inventor 王鹏和田芳幸松尾研吾
Owner IHI CORP