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Method for delivering sequential power pulses

A technology of power pulse and power, applied in the direction of pulse technology, pulse generation, electric pulse generation, etc., can solve problems such as inferior quality

Active Publication Date: 2017-04-19
OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The power distribution of such pulses is correspondingly uncontrolled and dynamic, and the sputtering methods established on this basis lead to layers which can be produced poorly and which are suboptimal in their properties.

Method used

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  • Method for delivering sequential power pulses
  • Method for delivering sequential power pulses
  • Method for delivering sequential power pulses

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] 1. First example:

[0029] In the scope of the first example, the power is applied to the virtual cathode for 0.5 ms, ie the loss interval tp0 is 0.5 ms and thus necessarily includes a power build-up interval of approximately 0.25 ms. In addition to the dummy cathodes, 6 partial cathodes were used. The power pulse interval at which power is applied to the partial cathodes in the group is fixed at tp1-6 = 0.2 ms and the overlap of the power pulse intervals is fixed at td1-6 = 0.02 ms. A total of 10 power cycles are experienced, ie 10 groups form a queue together with loss intervals. Thus, the total queue interval lasts 10*6*(0.2ms-0.02ms)+0.5ms=10.8ms+0.5ms=11.3ms.

[0030] Thus, a loss interval of 0.5 ms corresponds to a time of 10.8 ms of power output for coating purposes. Thus 20 times more power is used for coating purposes than the power loss at the dummy cathode.

[0031] Now if there is 40kW on the partial cathodes during the power pulse interval and an averag...

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Abstract

The invention relates to a method for providing a power pulse for a PVD atomizing cathode comprising a power absorbing part and a part of the cathode, wherein the power is reduced on the power absorbing part during a power build-up interval of the generator and then The power is reduced at the partial cathodes, switching in such a way that the power extraction from the power generator does not have to be interrupted.

Description

technical field [0001] The invention relates to a method for generating power pulses. Background technique [0002] Such power pulses are required, for example, in the field of HIPIMS technology. HIPIMS stands for High Power Pulsed Magnetron Sputtering. This is a vacuum coating method in which material is sputtered from the cathode with a very high discharge current, whereby it is ensured that the sputtered material is completely positively ionized. At the same time, if a negative voltage is applied to the substrate to be coated, this leads to the fact that the positive ions formed by atomization are accelerated towards the substrate and thus cause a dense layer to build up. For example, powers of 40 kW and higher are used here. However, the material can be atomized by the cathode only in the context of short power pulses, since the electrodes can be damaged by overheating in the case of longer power applications. The duration of the atomization which can be atomized wit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/34C23C14/34
CPCH01J37/3467C23C14/3485C23C14/352H01J37/34C23C14/54H03K3/012
Inventor S·克拉斯尼策尔D·伦迪M·莱希塔勒
Owner OERLIKON SURFACE SOLUTIONS AG PFAFFIKON