Cerium-doped antimonate luminescent film, preparation method and application of luminescent film
A technology of luminescent thin film and antimonate, which is applied in the direction of luminescent materials, chemical instruments and methods, semiconductor devices, etc.
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[0034] The preparation method of the above-mentioned cerium-doped antimonate luminescent film comprises the following steps:
[0035] S11. According to Me 6 Sb 2 o 11 :xCe 3+ The stoichiometric ratio of each element weighs MeO, Sb 2 o 5 and CeO 2 The powder is mixed evenly and sintered at 900°C to 1300°C to make a target.
[0036] x is 0.01 to 0.05, and Me is Mg, Ca, Sr, Ba or Zn.
[0037] Preferably, x is 0.03.
[0038] In S11, preferably, MeO, Sb 2 o 5 and CeO 2Mix the powder evenly and sinter at 1250°C to make a Ф50mm×2mm ceramic target.
[0039] S12. After providing the substrate and pre-treating the substrate, put the target and substrate obtained in S11 into the vacuum chamber of the pulse laser deposition coating equipment, and adjust 1.0×10 -3 Pa~1.0×10 -5 Pa.
[0040] The operation of pretreating the substrate may be: sequentially ultrasonic cleaning the substrate with acetone, absolute ethanol and deionized water, and then performing oxygen plasma treat...
Embodiment 1
[0076] According to the molar weight of 6mmol, 1mmol, 0.03mmol, choose MgO, Sb 2 o 5 and CeO 2 The powder, after uniform mixing, is sintered at 1250°C to form a Ф50mm×2mm ceramic target, and the target is loaded into a vacuum chamber. The glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate is set to 60mm. Use a mechanical pump and a molecular pump to pump the vacuum of the cavity to 5.0×10 -4 Pa, the working flow rate of oxygen is 20sccm, the pressure is adjusted to 3.0Pa, the substrate temperature is 500°C, and the energy of the pulsed laser is 150mJ. By controlling the time of pulsed laser deposition to be 20min, the chemical formula with a thickness of 140nm is Mg 6 Sb 2 o 11 : 0.03Ce 3+ Ce-doped antimonate luminescent film. Finally, a cathode made of Ag material is vapor-deposited on the lumi...
Embodiment 2
[0079] According to the molar weight of 6mmol, 1mmol, 0.01mmol, choose MgO, Sb 2 o 5 and CeO 2 The powder, after uniform mixing, is sintered at 900°C to form a Ф50mm×2mm ceramic target, and the target is loaded into a vacuum chamber. The glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate was set to 45mm. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 1.0×10 -3 Pa, the working flow rate of oxygen is 10sccm, the pressure is adjusted to 0.5Pa, the substrate temperature is 250°C, and the energy of the pulsed laser is 80mJ. By controlling the time of pulsed laser deposition to be 13min, the chemical formula with a thickness of 100nm is M g6 Sb 2 o 11 : 0.01Ce 3+ Ce-doped antimonate luminescent film. Finally, a cathode made of Ag material is vapor-deposited on the ...
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