CCD modulation transfer function measuring device and method

Abstract

The invention discloses a CCD modulation transfer function measuring device and method. The CCD modulation transfer function measuring device comprises a three-dimensional adjusting system, a light source and an optical processing unit. The optical processing unit is fixed to the three-dimensional adjusting system. The optical processing unit comprises a target slit and a microscope objective. The target slit and the microscope objective are arranged on an emergent light path of the light source in sequence. The microscope objective comprises two faces, wherein threads are arranged on one face, the face with the threads is an image space, and the other face is an object space. Emergent light of the light source conducts incidence from the image space and conducts outgoing from the object space. According to the CCD modulation transfer function measuring device and method, the high-imaging-quality target silt with the width smaller than one micron is provided for obtaining of a line spread function, the obtained shrunk high-quality target silt is converged on a measured imaging device array, so that fine sampling is achieved, and the measurement precision is improved.

Description

technical field [0001] The invention belongs to the field of optical detection, and relates to a CCD modulation transfer function measurement device and a measurement method, which can be established for a color CCD with a high-precision modulation transfer function measurement device. Background technique [0002] At present, the measurement methods of CCD transfer function can be divided into three categories, one is to focus on the structure and electrical characteristics of CCD itself, starting from the physical model of CCD working mechanism, analyzing the physical process of CCD work, and obtaining the theoretical model of CCD transfer function. More typically, Ibrahima Djit et al. of the University of Toulouse in France proposed a theoretical model of the CCD transfer function solved by the steady-state diffusion equation under the condition of sinusoidal light injection. Therefore, it is difficult to realize this method, and it only stays in the laboratory stage at p...

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Problems solved by technology

[0008] The above methods have their own advantages and disadvantages. The first two methods basically stay in the laboratory stage and cannot be applied in engineering.

The third type of algorithm has a corresponding diffraction effect on the edge of the knife because of the different positions of the knife edge, which affects the test results

Although this can avoid the influence of the edge diffraction effect on the transmission results as little as possible, but because there is generally a protective glass window in front of the CCD itself (there is a color filter in front of the color CCD target), the knife edge cannot be placed on the photosensitive At the surface, diffraction effects and ghosting will have a greater impact on the measurement results of the modulation transfer function

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