Method for calibrating laser-damaged thresholds

A technology of laser damage threshold and calibration method, which is applied in the direction of testing optical properties, can solve the problems of limiting direct comparison and fluctuation of damage threshold measurement results, and achieves the effect of uniform particle size and spatial distribution, and good consistency of damage characteristics

Active Publication Date: 2015-01-21
TONGJI UNIV
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Problems solved by technology

However, due to the complexity and transient nature of laser damage, the damage threshold measurement results of the same sample or the same batch of samples usually have large fluctuations, and even differ by several times.
Therefore, the above issues always limit the direct comparison of the measurement results of different laser damage threshold test systems

Method used

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  • Method for calibrating laser-damaged thresholds
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Embodiment

[0039]A method for calibrating laser damage threshold. The method takes artificial mixed nodular defects in high-reflection films as a reference, and statistically measures the damage threshold of 90% of nodular defects in a certain area, and uses this damage threshold as a benchmark for different The measurement results of the laser damage threshold test system are calibrated and calibrated.

[0040] Test systems capable of damage threshold measurements of highly reflective laser thin films such as figure 1 As shown, the device for measuring the damage threshold includes a Nd:YAG pump laser 1 for emitting a pump laser with a working frequency of 10 Hz, an electric translation stage 3 with an external trigger function for driving the measured sample 2 to move, and realizing dark field illumination. The light source 4 and the damage monitoring component for real-time monitoring and acquiring images of the tested sample, the damage monitoring component includes an online microsc...

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Abstract

The invention relates to a method for calibrating laser-damaged thresholds. The method includes the steps that in three-wavelength high-reflection film plating, evenly-distributed mixed type knot defects are prepared through SiO2 particles in three sizes in combination with absorbability metal Hf film; the advantages, including the large size, the even particle diameters, the even space distribution and the good laser damaged characteristic coincidence, of the knot defects are used, the knot defects serve as standard samples in a raster scanning laser damaged threshold test, and the damaged thresholds of 90% of the knot defects within certain area during splashing are measured in a statistics mode; the least square fit is carried out on measurement results of different laser damaged threshold testing systems, and the slope and the intercept of a fit straight line are calibration parameters of the laser-damaged thresholds. Compared with the prior art, the method has the advantages of being simple and accurate in judgment and the like.

Description

technical field [0001] The invention relates to a method for testing the laser damage threshold of an optical element, in particular to a method for calibrating the laser damage threshold. Background technique [0002] In order to deeply study the damage mechanism of high damage threshold optical components and accurately evaluate the laser damage resistance of components, it is necessary to continuously develop and improve the measurement technology of laser damage threshold, improve the measurement precision and accuracy of damage threshold, and guide the development of high damage threshold optical components. Optimization and improvement of component manufacturing process. [0003] At present, in the damage threshold measurement process, on the one hand, in order to more objectively reflect the macroscopic laser damage performance of the component, the measurement area is usually selected as large as possible. Therefore, the raster scanning laser damage threshold measure...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 王占山马彬陆梦蕾王可程鑫彬
Owner TONGJI UNIV
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