Magnetorheological polishing device and method
A technology of magnetorheological polishing and magnetorheological fluid, which is applied in the field of polishing equipment and technology, can solve the problems of poor uniformity of microscopic texture on the polished surface, affect the quality of polishing, and poor adaptability, so as to improve the uniformity of microscopic texture , Improve the polishing quality and remove the effect of high efficiency
A technology of magnetorheological polishing and magnetorheological fluid, which is applied in the field of polishing equipment and technology, can solve the problems of poor uniformity of microscopic texture on the polished surface, affect the quality of polishing, and poor adaptability, so as to improve the uniformity of microscopic texture , Improve the polishing quality and remove the effect of high efficiency
CN104308671AActive Publication Date: 2015-01-28NORTHEASTERN UNIV
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[0036] In this embodiment, the above-mentioned magnetorheological polishing device is used to polish the surface of K9 optical glass (hereinafter referred to as the workpiece) whose length and width are 100 mm ร 60 mm and the pre-processed surface roughness Ra = 67 nm. The following steps are carried out:
[0037] (1) Install the workpiece under the non-magnetic fixture, adjust the upper and lower positions of the platform, so that the workpiece is immersed in the magnetorheological fluid in the liquid-carrying tank; adjust the thickness of the non-magnetic backing plate to make the distance between the electromagnet and the workpiece 15mm;
[0038] (2) Turn on the driving motor of the workpiece shaft, so that the workpiece shaft drives the soft magnetic plate, the non-magnetic fixture and the workpiece to rotate synchronously;
[0039] (3) Adjust the electromagnet coil current to DC 3A so that the magnetic flux density of the electromagnet is 0.25T;
[0040] (4) Adjust the e...
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Abstract
The invention discloses a magnetorheological polishing device. A polishing head consists of a workpiece shaft, a nonmagnetic fixture fixed at the lower end of the workpiece shaft and a soft magnetic plate arranged between the nonmagnetic fixture and the workpiece shaft; a fluid carrying groove containing magnetorheogical fluid is positioned below the polishing head; the bottom of the fluid carrying groove is provided with a polishing pad; an electromagnet is positioned below the fluid carrying groove and is kept 12-18mm away from a workpiece; the electromagnet and the fluid carrying groove are driven by a reciprocating transmission mechanism and linearly reciprocate parallel to the polished surface of the workpiece. The device is used for magnetorheological polishing, the flux density of the electromagnet is 0.1-0.4T, the reciprocating travel is slightly greater or equal to the workpiece polishing length, and the reciprocating speed is 0.5-5mm / s. A surface material of the workpiece is removed under the compound motion of translational motion of a magnetic field and rotation of the workpiece. The device has the advantages of good homogenization of the magnetic field, smooth exchange of the magnetorheogical fluid in a polishing area, easy discharge of processing scraps, good homogenization of micro textures of the polished surface of the workpiece and the like, and is particularly suitable for grinding and polishing large-plane surfaces of narrow and long workpieces.
Description
technical field [0001] The invention relates to polishing equipment and technology, in particular to a device and method for polishing workpieces by using magnetorheological fluid. Background technique [0002] With the continuous development of optical technology and semiconductor lighting technology, ultra-smooth large-size planar components such as monocrystalline silicon surfaces and display panels are more and more widely used. For the processing of these components, it is required to meet the requirements of small residual stress and extremely thin surface damage layer. However, traditional ultra-smooth surface processing methods, such as mechanochemical polishing and chemical mechanical polishing, corrode the outer surface of the workpiece easily causing serious subsurface damage, polishing liquid pollution, high production cost, low efficiency, and high scrap rate. [0003] Magnetorheological Fluids (Magnetorheological Fluids) are a new type of intelligent soft matt...
Claims
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Patent Timeline
28 Jan 2015
Publication
CN104308671A
- IPC
- B24B1/00
- CPC
- B24B1/005
- Inventors
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