Magnetorheological polishing device and method

Abstract

The invention discloses a magnetorheological polishing device. A polishing head consists of a workpiece shaft, a nonmagnetic fixture fixed at the lower end of the workpiece shaft and a soft magnetic plate arranged between the nonmagnetic fixture and the workpiece shaft; a fluid carrying groove containing magnetorheogical fluid is positioned below the polishing head; the bottom of the fluid carrying groove is provided with a polishing pad; an electromagnet is positioned below the fluid carrying groove and is kept 12-18mm away from a workpiece; the electromagnet and the fluid carrying groove are driven by a reciprocating transmission mechanism and linearly reciprocate parallel to the polished surface of the workpiece. The device is used for magnetorheological polishing, the flux density of the electromagnet is 0.1-0.4T, the reciprocating travel is slightly greater or equal to the workpiece polishing length, and the reciprocating speed is 0.5-5mm / s. A surface material of the workpiece is removed under the compound motion of translational motion of a magnetic field and rotation of the workpiece. The device has the advantages of good homogenization of the magnetic field, smooth exchange of the magnetorheogical fluid in a polishing area, easy discharge of processing scraps, good homogenization of micro textures of the polished surface of the workpiece and the like, and is particularly suitable for grinding and polishing large-plane surfaces of narrow and long workpieces.

Description

technical field [0001] The invention relates to polishing equipment and technology, in particular to a device and method for polishing workpieces by using magnetorheological fluid. Background technique [0002] With the continuous development of optical technology and semiconductor lighting technology, ultra-smooth large-size planar components such as monocrystalline silicon surfaces and display panels are more and more widely used. For the processing of these components, it is required to meet the requirements of small residual stress and extremely thin surface damage layer. However, traditional ultra-smooth surface processing methods, such as mechanochemical polishing and chemical mechanical polishing, corrode the outer surface of the workpiece easily causing serious subsurface damage, polishing liquid pollution, high production cost, low efficiency, and high scrap rate. [0003] Magnetorheological Fluids (Magnetorheological Fluids) are a new type of intelligent soft matt...

AI Technical Summary

Problems solved by technology

Its disadvantage is: for polishing narrow and long workpieces, the diameter of the liquid-carrying tank must be designed to be very large.

[0011] Most of the above magnetorheological devices are limited to the precise grinding and polishing of optical lens materials with little change in lateral and longitudinal dimensions. For flat workpieces, especially narrow and long workpieces, their adaptability is poor because of two Big problem: First, because the magnetic field cannot move in the direction parallel to the polishing surface, the exchange of magnetorheological fluid in the polishing processing area is not smooth, so that the processing debris cannot be discharged in time, resulting in poor uniformity of the microscopic texture of the polishing surface. Affect the polishing quality; second, if it is used for polishing flat workpieces or narrow and long workpieces, only increase the size of the liquid carrier tank or add workpiece feeding devices, but this is not conducive to simplifying the processing procedure

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