Thickness measurement method and thickness measurement system
A technology for thickness measurement and measurement value, applied in the field of metrology, which can solve the problems of X-ray output power operator hazards and inability to reach the normal detection range, etc.
Inactive Publication Date: 2017-06-20
赵刚
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[0003] When the output power of X-ray is too large, it will cause harm to the operator, because the biological mortality rate of long-term high-dose X-irradiation can reach 100%, but if the output power is reduced for safety (the State Environmental Protection Agency has relevant regulations), it cannot be achieved. Purpose of normal detection range
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[0020] The present invention will be further described in detail below in conjunction with the accompanying drawings and in the form of embodiments.
[0021] Such as figure 1 As shown, the thickness measurement system of the present invention includes two groups of thickness measurement devices, one group of X-ray measurement devices composed of high-voltage power supply 1, X-ray sensor light tube 2, power chamber 3, etc., and one group is electromagnetic sensor 4 and electromagnetic sensor The electromagnetic measuring device composed of 5, the principle of the electromagnetic measuring device is to measure the distance from the metal surface to be tested to the upper and lower electromagnetic sensors by using oppositely installed electromagnetic sensors, and then use a metal sample of known thickness as calibration to obtain measurement data. The measuring range of the X-ray measuring device is smaller than that of the electromagnetic measuring device. The output power of t...
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The invention discloses a thickness measurement method and a thickness measurement system. The thickness measurement method carries out thickness measurement on a measured product by utilizing at least two groups of measurement devices. Measuring ranges of the groups of measurement devices are mutually not same, and small range measurement is done by utilizing at least one group of X-ray measurement device. The thickness measurement system comprises at least two groups of measurement devices having different measuring ranges, wherein at least one group of measurement device is an X-ray measurement device, and the X-ray measurement device is the small range measurement device. The thickness measurement system utilizes at least two groups of measurement devices, wherein at least one group of measurement device is the X-ray measurement device, thereby ensuring measurement accuracy of the final product, reducing output power of the X-ray measurement devices, reducing radiation, not being limited by measuring ranges, and providing better control for product processing.
Description
technical field [0001] The invention relates to measurement technology, in particular to a thickness measurement method and a thickness measurement system. Background technique [0002] One of the existing thickness measurement methods is to use an X-ray thickness gauge. Since the output power of X-rays is directly proportional to the penetrating power, the output power will be higher if it wants to penetrate the measured material with a higher density. Large, which leads to the need to use X-rays with high output power to penetrate the measured object and effectively carry out data acquisition and measurement in the case of some measured objects with a large specific gravity. [0003] When the output power of X-ray is too large, it will cause harm to the operator, because the biological mortality rate of long-term high-dose X-irradiation can reach 100%, but if the output power is reduced for safety (the State Environmental Protection Agency has relevant regulations), it can...
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IPC IPC(8): G01B15/02G01B11/06G01B7/06
CPCG01B7/10G01B11/06G01B15/02
Inventor 赵刚
Owner 赵刚