Probe and sample approaching device and method for scanning probe microscope

Abstract

The invention discloses a probe and sample approaching device for a scanning probe microscope. The device includes a base provided with a sample table; a plurality of fixing frames are evenly arranged at the upper end of the sample table; a scanning probe head is arranged at the upper ends of the fixing frames; a probe holder matched with a probe is arranged in the scanning probe head; the sample table is arranged at the front end of the probe holder; a sample moving device which can perform three-dimensional movement is arranged in the sample table; a scanner is arranged in the sample moving device and connected with a Z-directional moving guide rail located in the sample moving device; the sample moving device is provided with a control device. The device has the advantages that the device is simple in structure and easy to operate; a structural loop between the scanning probe head and the sample table is shortened by performing structural integration on the scanning probe head and the sample table, the mechanical noise between the probe and a sample is effectively lowered, and the accuracy and anti-interference performance of the instrument are improved; besides, the sample can be vertically approach the probe completely in the approaching process, and therefore accurate positioning on a sample scanning area is achieved.

Description

[0001] technical field [0002] The invention relates to a probe and sample approaching device and method of a scanning probe microscope. [0003] Background technique [0004] Scanning Probe Microscope (SPM) studies the surface structure and properties of substances by detecting the extremely weak interatomic interaction between the surface of the sample to be tested and a miniature force-sensitive element (generally called a scanning probe). One end of a pair of extremely weak force-sensitive microcantilever is fixed, and the tiny needle tip at the other end is close to the sample. At this time, the tiny needle tip will interact with the sample, and the force will cause the microcantilever to deform or change its motion state; when scanning the sample, use the sensor By detecting these changes, the force distribution information can be obtained. In the work, the laser detection method is usually used to measure the position changes of the micro-cantilever corresponding to...

AI Technical Summary

Problems solved by technology

[0006] Using this approach method, the scanning probe and the sample stage are separated structures. There are two commonly used structural devices: one is that the scanning probe and the sample stage are connected by a triangular support screw, and when the probe approaches When sampling, because the synchronization of the triangular support screw cannot be guaranteed, generally two of the support frames are controlled to descend to a certain position, and then the third support frame is controlled to descend, so that the probe finally approaches the sample; therefore, the disadvantages of this structural device It is because the probe does not descend vertically when it approaches the sample. After the probe approaches, the scanning area of ​​the sample will shift, making it difficult to achieve accurate positioning of the scanning area of ​​the sample; there is also a cantilever beam between the scanning probe and the sample stage The structure is connected, and there is an inverted U shape between the two; when the probe approaches the sample, it is only necessary to control the descent of the cantilever beam to make the probe approach the sample; although this structural device can make the probe approach the sample vertically, the Due to the long structural loop between the probe and the sample, the mechanical noise increases and the stability decreases

[0007] Based on the above, there are many defects and limitations in the existing scanning probe microscope probe and sample approach method. In order to solve these problems, it is urgent to develop a new scanning probe microscope probe and sample approach method. method

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