Lens set mounting component and optical measuring system with same

Abstract

A lens set mounting component comprises a base, a light path positioning lens set, at least two light path detecting lens sets and an observable light path lens set. The light path positioning lens set is mounted on the base and used for positioning a confocal plane of a component to be measured below the bottom of the base, the light path detecting lens sets are mounted on the base and used for detecting different light paths, the observable light path lens set is mounted in the base, and when one of the light path detecting lens sets detects the component to be measured, imaging of the light path detecting lens set is observable by the observable light path lens set, wherein focuses of the light path detecting lens sets and the observable light path lens set are the same and limited on the confocal plane. By the lens set mounting component, frequent actions and repeated positioning of a moving platform are avoided, and system reliability and stability are improved; through multichannel parallel measurement, measuring efficiency is improved and cost is reduced.

Description

technical field [0001] The invention relates to the realization of a multi-optical system confocal measurement or imaging, in particular to the measurement, imaging and processing modules on semiconductor large-scale integrated circuit manufacturing and testing equipment. Background technique [0002] In the manufacturing and testing process of semiconductor large-scale integrated circuits, it is often necessary to use multiple optical systems (that is, multiple independent optical paths) to measure, image or process a certain point on the wafer. The following is an example of measurement equipment: [0003] There are two common methods: one is to keep the measurement point still, move each or each group of measurement systems in turn to focus on the measurement point for measurement, after one or a group of measurement systems have measured, move it away from the measurement point, and then move the One or the next group of measurement systems moves to the measurement point...

AI Technical Summary

Problems solved by technology

[0004] These two methods need to focus continuously because they need to move the wafer under test or each measurement system. On the one hand, the motion platform is required to have high motion reliability, repeat positioning accuracy and service life, so its cost is relatively high; On the one hand, the measurement cycle includes multiple focusing actions and movements, which are difficult to complete in a short period of time, thus affecting measurement efficiency

Images