Optical filter device, optical module, electronic device, and MEMS device

An optical filter and interference filter technology, applied in the field of MEMS devices and optical filter devices, can solve the problems of MEMS components falling off, interference filter spectroscopic accuracy decline, interference filter falling off, etc., to achieve the effect of increasing fixing force
CN104516101AInactive Publication Date: 2015-04-15SEIKO EPSON CORP
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SEIKO EPSON CORP
Publication Date
2015-04-15
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

An optical filter device includes a wavelength variable interference filter, a housing that stores the wavelength variable interference filter, and a bonding member that fixes a movable substrate to the housing. The housing includes a fixing portion that comes into contact with the bonding member, the fixing portion includes a pedestal fixing surface (first surface) facing a portion of a surface of the movable substrate, a sidewall fixing surface (second surface), continuous with a portion of a periphery of the pedestal fixing surface, which faces a lateral side of the movable substrate, and an intersection surface (third surface) continuous from a remaining portion in a periphery of the pedestal fixing surface in a direction away from the movable substrate, and the bonding member is provided between the substrate surface and the pedestal fixing surface, and between the lateral side and the sidewall fixing surface.
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Description

technical field

[0001] The present invention relates to an optical filter device, an optical module, electronic equipment and a MEMS device. Background technique

[0002] Conventionally, there are known interference filters in which reflective films are disposed opposite to each other on the opposing surfaces of a pair of substrates via a predetermined gap, mirror elements in which reflective films are disposed on the substrates, and piezoelectric elements such as crystal resonators disposed on the substrates. Various MEMS (Micro Electro Mechanical Systems (Micro Electro Mechanical Systems)) components such as piezoelectric vibration elements on the surface. In addition, there is known a MEMS device in which such a MEMS element is accommodated in a storage container (for example, refer to Patent Document 1).

[0003] Patent Document 1 describes an infrared gas detector (optical filter device) including a unit (casing) including a plate-shaped base and a cylindrical cover. ...

Claims

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