Single-piece double-shaft butterfly wing type micromechanical accelerometer

Abstract

The invention discloses a single-piece double-shaft butterfly wing type micromechanical accelerometer which comprises a sensitive silicon structure and a glass substrate. The sensitive silicon structure is provided with four sensitive mass blocks as movable capacitor plates. The glass substrate is provided with fixed capacitor plates which are arranged in one-to-one correspondence with the four sensitive mass blocks and opposite to the four sensitive mass blocks. The sensitive silicon structure is connected with the glass substrate in a bonding mode. The sensitive silicon structure further comprises a fixed frame, a supporting oblique beam and a trapezoidal cantilever beam. The four sensitive mass blocks include two flat plate mass blocks and two concave plate mass blocks. The two ends of the supporting oblique beam are connected to the inner side of the fixed frame, and the supporting oblique beam divides the inner side of the fixed frame into two regions, wherein one flat plate mass block and one concave plate mass block are arranged in each region, and all the sensitive mass blocks are connected to the supporting oblique beam through the trapezoidal cantilever beam. The single-piece double-shaft butterfly wing type micromechanical accelerometer has the advantages of good temperature stability and robustness and low cost.

Description

technical field

[0001] The invention relates to the field of micro-mechanical sensors, in particular to a single-chip biaxial butterfly-wing micro-mechanical accelerometer. Background technique

[0002] Accelerometers are mainly used to measure the motion parameters of moving objects relative to the inertial space. Traditional accelerometers are limited by volume, weight and cost, and it is difficult to popularize and apply them in the civilian field. Micro-mechanical accelerometers based on MEMS (micro-electromechanical systems) technology have outstanding advantages such as small size, light weight, low cost, and high reliability, and are widely used in automotive motion state control systems, camera stabilization systems, and sports machinery control. .

[0003] Existing accelerometers are mainly divided into piezoresistive, voltage, capacitive, tunnel, etc. Due to different design structures, there are accelerometers that can detect one, two or three axial accelerations...

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