Multi-functional infrared gas sensor

Abstract

The invention designs a multi-functional infrared gas sensor which comprises an infrared characteristic filter and a thermopile infrared detector, wherein the thermopile infrared detector comprises a plurality of sensing units; each sensing unit comprises a silicon substrate, a frame, thermopiles, a support arm, an infrared absorption layer and an etching opening; the etching opening is arranged in the center of the silicon substrate by the frame; the support arm is arranged on the silicon substrate; thermopiles are arranged on the support arm at intervals; the infrared absorption layer is suspended in the middle of the frame and is fixedly connected with the frame by the support arms; the silicon substrate and the infrared absorption layer suspended in the middle of the frame respectively form a cold junction region and a hot junction region of the thermopiles.

Description

technical field [0001] Sensor field, especially an infrared gas sensor. Background technique [0002] At present, the infrared gas sensors available on the market generally have problems such as single function, large volume, poor structural design, poor firmness, fragile film, serious temperature drift, etc. At the same time, they also have the disadvantages of complex production process and low yield. The reason for the above results is that the production process of the optical filter is relatively backward, and the integration degree of the sensor is low. If it is necessary to detect different gases, it can only be realized through a multi-window structure, so that the volume of the entire sensor cannot be reduced. Contents of the invention [0003] In order to solve the above-mentioned problems, the present invention designs a high integration degree, reasonable structural design, and multi-function. Tiny multifunctional infrared gas sensor. [0004] In order to ach...

AI Technical Summary

Problems solved by technology

[0002] At present, the infrared gas sensors available on the market generally have problems such as single function, large volume, poor structural design, poor firmness, fragile film, serious temperature drift, etc. At the same time, they also have the disadvantages of complex production process and low yield.

The reason for the above results is that the production process of the optical filter is relatively backward, and the integration degree of the sensor is low. If it is necessary to detect different gases, it can only be realized through a multi-window structure, so that the volume of the entire sensor cannot be reduced.

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