Fabrication process of 100V Schottky diode
A Schottky diode and manufacturing process technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of low implantation doping concentration, uneven push junction, thin epitaxial thickness, etc., and achieve the doping concentration High, not easy to electrostatic breakdown, the effect of thick epitaxy
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Embodiment 1
[0029] A kind of 100V Schottky diode manufacturing process, its steps are:
[0030] a. Substrate silicon wafer treatment. The substrate silicon wafer is cleaned with 1# and 2# cleaning solutions at 70°C for 10 minutes, rinsed with water for 10 minutes, and dried before use. The 1# cleaning solution is NH 3 h 2 O:H 2 o 2 :H 2 O=1:1:5, 2# cleaning solution HCL:H 2 o 2 :H 2 O=1:1:5;
[0031] b. Initial oxidation: after completing step a, the substrate silicon wafer is cleaned, and then the initial oxidation process is carried out. First, put the silicon wafer into the quartz boat, and then enter the boat into the quartz furnace tube. The speed of the boat is 20cm / s. After the boat enters, cover For good grinding, nitrogen gas (6 liters per minute) was introduced at 750 ° C for 30 minutes, the temperature was raised from 750 ° C to 950 ° C, and the temperature was kept at 950 ° C, nitrogen was stopped and replaced by oxygen, and oxygen was introduced (3.5 liters per minute)...
Embodiment 2
[0050] A kind of 100V Schottky diode manufacturing process, its steps are:
[0051] a. Substrate silicon wafer treatment. The substrate silicon wafer is cleaned with 1# and 2# cleaning solutions at 80°C for 11 minutes each, rinsed with water for 9 minutes, and dried before use. The 1# cleaning solution is NH 3 h 2 O:H 2 o 2 :H 2 O=1:1:5, 2# cleaning solution HCL:H 2 o 2 :H 2 O=1:1:5;
[0052] b. Initial oxidation: After the substrate silicon wafer is cleaned in step a, the initial oxidation process is carried out. First, put the silicon wafer into the quartz boat, and then enter the boat into the quartz furnace tube. The speed of the boat is 21cm / s. After the boat enters, cover For good grinding, nitrogen gas (7 liters per minute) was introduced at 745°C for 29 minutes, the temperature rose from 745°C to 940°C, and the temperature was maintained at 945°C. The nitrogen gas was switched to oxygen, and oxygen was introduced (3.5 liters per minute) for 22 Minutes later, ch...
Embodiment 3
[0071] A kind of 100V Schottky diode manufacturing process, its steps are:
[0072] a. Substrate silicon wafer treatment. The substrate silicon wafer is cleaned with 1# and 2# cleaning solutions at 80°C for 10 minutes, rinsed with water for 11 minutes, and dried before use. The 1# cleaning solution is NH 3 h 2 O:H 2 o 2 :H 2 O=1:1:5, 2# cleaning solution HCL:H 2 o 2 :H 2 O=1:1:5;
[0073] b. Initial oxidation: after completing step a, the substrate silicon wafer is cleaned, and then the initial oxidation process is carried out. First, put the silicon wafer into the quartz boat, and then enter the boat into the quartz furnace tube. The speed of the boat is 20cm / s. After the boat enters, cover For good grinding, nitrogen gas (7 liters per minute) was introduced at 750°C for 31 minutes, the temperature was raised from 750°C to 950°C, and the temperature was kept at 950°C. Nitrogen was stopped and replaced with oxygen, and oxygen was introduced (3.5 liters per minute) 21 M...
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