A Manufacturing Technology of 40v Schottky Diode with Reduced Secondary Breakdown Ratio
A Schottky diode, secondary breakdown technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc. The effect of increasing junction depth and uniformity and increasing impurity concentration
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[0034] Example 1
[0035] A 40V Schottky diode fabrication process that reduces the secondary breakdown ratio (only applied to 40V), the steps are:
[0036] a. Cleaning of the substrate silicon wafer: the substrate silicon wafer is made of NH 3 H 2 O:H 2 O 2 :H 2 O=1:1:5 cleaning solution and HCL:H 2 O 2 :H 2 The cleaning solution of O = 1:1:5 was cleaned at 75°C for 10 minutes each, the cleaned substrate silicon wafer was rinsed for 10 minutes, and dried for later use;
[0037] b. Initial oxidation: After completing the initial oxidation process of the substrate silicon wafer in step a, first put the silicon wafer into a quartz boat, and then enter the boat into the quartz furnace tube, the boat speed is 20cm / s, and the boat is finished, and the grinding mouth is covered. Introduce nitrogen at 750 ℃, 6 liters per minute, 30 minutes, the temperature rises from 750 ℃ to 950 ℃, the temperature is kept at 950 ℃, stop nitrogen and change to oxygen, after 10 minutes of ox...
Example Embodiment
[0058] Example 2
[0059] A 40V Schottky diode fabrication process that reduces the secondary breakdown ratio (only applied to 40V), the steps are:
[0060] a. Cleaning of the substrate silicon wafer: the substrate silicon wafer is made of NH 3 H 2 O:H 2 O 2 :H 2 O=1:1:5 cleaning solution and HCL:H 2 O 2 :H 2 The cleaning solution of O = 1:1:5 was cleaned at 70°C for 9 minutes each, the cleaned substrate silicon wafer was rinsed for 9 minutes, and dried for later use;
[0061] b. Initial oxidation: After completing the initial oxidation process of the substrate silicon wafer in step a, first put the silicon wafer into a quartz boat, and then enter the boat into the quartz furnace tube, the boat speed is 19cm / s, and the boat is finished, and the grinding mouth is covered. Introduce nitrogen at 747 °C, 5 liters per minute, 29 minutes, the temperature rises from 747 °C to 947 °C, the temperature is maintained at 947 °C, stop nitrogen and change to oxygen, after 9 minutes ...
Example Embodiment
[0082] Example 3
[0083] A 40V Schottky diode fabrication process that reduces the secondary breakdown ratio (only applied to 40V), the steps are:
[0084] a. Cleaning of the substrate silicon wafer: the substrate silicon wafer is made of NH 3 H 2 O:H 2 O 2 :H 2 O=1:1:5 cleaning solution and HCL:H 2 O 2 :H 2 The cleaning solution of O = 1:1:5 was cleaned at 80°C for 11 minutes each, the cleaned substrate silicon wafer was rinsed for 1 minute, and dried for later use;
[0085] b. Initial oxidation: After completing the initial oxidation process of the substrate silicon wafer in step a, first put the silicon wafer into a quartz boat, and then enter the boat into the quartz furnace tube, the boat speed is 21cm / s, and the boat is finished, and the grinding mouth is covered. Introduce nitrogen at 753 °C, 7 liters per minute, 31 minutes, the temperature rises from 753 °C to 953 °C, the temperature is kept at 953 °C, stop nitrogen and change to oxygen, after 11 minutes of ox...
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