Swing arm contour surface shape detection method based on combination of radial scanning and circular scanning

Abstract

The invention discloses a swing arm contour surface shape detection method based on combination of radial scanning and circular scanning. The method includes: describing the surface features of a detected element by utilization of a method based on the Forbes polynomial fitting and obtaining the surficial gradient distribution of the detected element under a non-analytical expression; building a mathematical model of the surface gradient and the feature contour of the detected element and extracting a feature contour line of the detected element; planning a measuring path on the extracted feature contour line according to the radial direction and the circular direction; conducting the radial scanning and the circular scanning on the detected element according to the planned measurement path through a probe of a swing arm contourgraph and obtaining the one-dimensional feature contour data of the detected element; and conducting interpolation, fitting and reconstruction on the one-dimensional feature contour data of the detected element by utilization of a surface shape deviation fitting reconstruction algorithm and finally obtaining the two-dimensional holomorphism of the detected element. The swing arm contour surface shape detection method based on the combination of the radial scanning and the circular scanning has the advantages of being high in efficiency and precision and wide in application.

Description

technical field

[0001] The invention belongs to the field of surface shape detection of optical elements, and in particular relates to a method for detecting the contour surface shape of a swing arm based on radial scanning combined with circular scanning. Background technique

[0002] The precise detection of optical singular surfaces (such as large gradient convex aspheric surfaces, free-form surfaces, conical surfaces, cylindrical surfaces, etc.) is a key bottleneck restricting the manufacture and application of such components, and has become a research hotspot in the field of optics in the world. This is mainly because the optical singular surface shape has the characteristics of free and complex surface shape, large gradient change, difficult definition and description, and difficult ray tracing, which brings many complex and difficult scientific problems to the high-precision detection of its surface shape. The methods of measuring the shape of optical singular surfac...

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