Method and system for monitoring pulse electrostatic discharging testing response of transmission line

Abstract

The invention relates to a method and a system for monitoring pulse electrostatic discharging testing response of a transmission line. A light emission microscope acquires light emission images of the pulse discharging process of each transmission line while a TLP testing system applies transmission line pulse under different pulse voltage to an electronic element, and each light emission image can be overlapped with optical reflecting images when the test is ended, so as to accurately position an electrostatic discharging channel and a damage point of the electronic element. With the adoption of the method and system, the electroluminescence phenomenon in the pulse electrostatic discharging testing process of the transmission line can be monitored in real time, thus the electrostatic discharging channel in the electronic element under the electrostatic discharging testing process can be clear, the damage point of electrostatic discharging can be timely found out and accurately positioned, and as a result, the weak link of electrostatic resistance of a product can be determined; in addition, the test information can be fully utilized, the test is simple, and good technological support is provided for the study on electrostatic damp of the electronic device and the improvement of ESD design; good engineering application values are achieved.

Description

technical field [0001] The invention relates to the technical field of electrostatic discharge testing of electronic components, in particular to a method for monitoring the response of a transmission line pulse electrostatic discharge test and a system for monitoring the response of a transmission line pulse electrostatic discharge test. Background technique [0002] Transmission Line Pulse (TLP) test refers to the use of transmission lines to generate short pulses (50 nanoseconds to 200 nanoseconds) to measure the current / voltage of ESD (Electro-Static discharge, electrostatic discharge) protection structures in electronic components characteristic method. A transmission line of constant impedance produces a square wave of constant amplitude. The short pulses generated by the TLP test are used to simulate short ESD pulses on electronic components. By using short pulses, the current passing through the tested sample and the voltage applied to the sample can be accurately ...

AI Technical Summary

Problems solved by technology

However, damage to electronic components caused by electrostatic discharge tests may have various degrees of burnout

When the degree of burn is relatively small and the burn area is small, the burn phenomenon cannot be observed by optical microscope or scanning electron microscope, so the damage point location cannot be realized

When the burnt degree is serious and the burnt area is large, it is difficult to accurately locate the initial damage position of the device by optical microscope or scanning electron microscope observation

In addition, the existing technical solutions also have shortcomings such as many test steps, long test time, and insufficient use of test information.

Images