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Method and device for correcting non-linear error of laser interferometric vibrometer with separation of interference quantity

A nonlinear error and laser interference technology, which is applied to measuring devices, instruments, and measuring ultrasonic/sonic/infrasonic waves, etc., can solve problems such as the inability to accurately identify nonlinear error parameters, reduce hardware requirements, and increase the speed of vibration measurement , The effect of reducing the requirements of the light source

Active Publication Date: 2018-06-26
HARBIN INST OF TECH
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Problems solved by technology

[0006] In view of the above-mentioned Heydemann correction method, when the displacement of the vibration target is less than λ / 2, the nonlinear error parameters cannot be accurately identified and corrected. The light source modulation method needs to be able to modulate the laser light source for the identification of nonlinear errors, and the measurement of vibration non-cooperative targets with different reflectivities. To solve the problem of quickly identifying nonlinear error parameters many times, the present invention proposes and develops a method and device for correcting nonlinear errors of a single-frequency laser interferometry vibrometer by interferometric separation. Linearity error parameters and the purpose of making corrections during vibration measurement

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  • Method and device for correcting non-linear error of laser interferometric vibrometer with separation of interference quantity
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  • Method and device for correcting non-linear error of laser interferometric vibrometer with separation of interference quantity

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[0027] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0028] A non-linear error correction device for a laser interferometric vibrometer with separation of interference quantities, in which a polarization beam splitter A2, a 1 / 4 wave plate B6, a convex lens A8, a convex lens B9, and a vibration target 10 to be measured are sequentially arranged on the output optical path of a frequency-stabilized laser 1 , the 1 / 4 wave plate B6 is located in the x, y plane, and coaxial with the polarization beam splitter prism A2, the fast axis direction of the 1 / 4 wave plate B6 is 45° counterclockwise with the y axis, the convex lens A8, the convex lens B9 and the measured vibration target 10 is parallel to the 1 / 4 wave plate B6; the 1 / 4 wave plate A3 and the reference reflector 5 are sequentially arranged on the reflected light path of the polarization beam splitter prism A2, and the 1 / 4 wave plate A3 is located at y , in...

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Abstract

The invention provides an interference-mount separating type nonlinear error correcting method and device for a laser interference vibration tester, and belongs to the technical field of laser measurement. The method is that performing separating measurement for reference light and measuring light strength through a light switch; extracting nonlinear error parameters in the related light signals; correcting DC deviation error and non-uniform amplitude of an orthogonal signal and other errors. With the adoption of the method and the device, the technical effect of extracting the nonlinear error parameters in the laser interference vibration tester as startup and quickly correcting the nonlinear error in the laser interference vibration tester on real time can be achieved.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a nonlinear error correction method and device of a laser interference vibrometer with separation of interference quantities. Background technique [0002] Since the 21st century, with the rapid development of scientific research and industrial manufacturing, the significance of vibration measurement in military and civilian fields has become increasingly prominent. With the development of ultra-precision measurement technology, laser interferometry has become a common technique in the field of vibration measurement. Laser interferometry is a derivative scheme of linear displacement laser interferometer measurement. It improves the linear displacement laser interferometer and adds a lens zoom system. It has the characteristics of high measurement accuracy and large dynamic measurement range. Therefore, the measurement accuracy of the laser interferometer vibromete...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H9/00
Inventor 谭久彬胡鹏程朱静浩郭玄标
Owner HARBIN INST OF TECH
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