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Method and device for correcting nonlinear error of single-frequency laser interferometer with interference quantity separation

A nonlinear error, single-frequency laser technology, applied in the field of laser measurement, can solve the problem of inability to accurately propose nonlinear error parameters, and achieve the effect of reducing hardware requirements and reducing requirements

Active Publication Date: 2017-09-08
HARBIN INST OF TECH
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Problems solved by technology

[0005] Aiming at the problem that the above-mentioned Heydemann correction method cannot accurately propose and correct the nonlinear error parameters when the displacement of the target mirror is less than λ / 2, and the light source modulation method needs to modulate the laser light source to identify the nonlinear error, the present invention proposes and develops an interferometric The non-linear error correction method and device of the separated single-frequency laser interferometer can achieve the purpose of obtaining the nonlinear error parameters when the single-frequency laser interferometer is turned on, and making corrections during displacement measurement

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  • Method and device for correcting nonlinear error of single-frequency laser interferometer with interference quantity separation
  • Method and device for correcting nonlinear error of single-frequency laser interferometer with interference quantity separation
  • Method and device for correcting nonlinear error of single-frequency laser interferometer with interference quantity separation

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Embodiment Construction

[0025] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0026]A non-linear error correction device for interferometric separation of single-frequency laser interferometers, in which a polarization beam splitter A2, a 1 / 4 wave plate B6, and a measuring mirror 8 are sequentially arranged on the output optical path of a frequency-stabilized laser 1, and the 1 / 4 wave The plate B6 is located in the x, y plane, and is coaxial with the polarization beam splitter prism A2, and the direction of the fast axis of the 1 / 4 wave plate B6 is 45° counterclockwise with the y axis; / 4 wave plate A3 and reference mirror 5, the 1 / 4 wave plate A3 is located in the y, z plane, and is coaxial with the polarizing beam splitter prism A2, and the fast axis direction of the 1 / 4 wave plate A3 is in a clockwise direction with the y axis 45 °; 1 / 2 wave plate 9, depolarization beam splitting prism 10 and polarization beam splitting prism...

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Abstract

The method and device for correcting the nonlinear error of a single-frequency laser interferometer by interferometric separation belong to the technical field of laser measurement. The invention uses an optical switch to realize separate measurement of reference light and measurement light intensity, and then extracts nonlinear error parameters in related optical signals. , and finally correct the DC offset error and amplitude unequal error of the quadrature signal; the present invention realizes the extraction of the nonlinear error parameters in the single-frequency laser interferometer signal immediately after starting up, and corrects the nonlinear error in the single-frequency laser interferometer The technical effect of fast and real-time correction of errors.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a method and device for correcting nonlinear errors of a single-frequency laser interferometer. Background technique [0002] Today, with the rapid development of ultra-precision measurement, fast ultra-precision displacement measurement has received extensive attention and research, and its application in the aerospace field has put forward higher requirements for measurement accuracy. Compared with the dual-frequency laser interferometer, the single-frequency laser interferometer has many advantages such as simple structure, easy circuit processing, and lower environmental requirements. main means. However, nonlinear errors have always been a key issue limiting the accuracy of single-frequency laser interferometers. [0003] In 1981, Heydemann proposed to use the ellipse fitting method of the least square method to obtain the nonlinear error parameters in the i...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
Inventor 谭久彬朱静浩胡鹏程
Owner HARBIN INST OF TECH
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