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Nonlinear error correction method and device for angular displacement single-frequency laser interferometer

A non-linear error and single-frequency laser technology, which is applied in the direction of optical devices, measuring devices, instruments, etc., can solve the problem that the non-linear error parameters cannot be accurately identified, and achieve the effect of reducing hardware requirements and light source requirements

Active Publication Date: 2017-09-05
HARBIN INST OF TECH
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Problems solved by technology

[0005] Aiming at the problem that the above-mentioned Heydemann correction method cannot accurately identify and correct nonlinear error parameters when the displacement difference between the two target mirror lines is less than λ / 2, and the light source modulation method requires a modulating laser light source to identify nonlinear errors, the present invention proposes and develops A method and device for correcting the nonlinear error of an angular displacement single-frequency laser interferometer based on an optical switch, which can achieve the purpose of obtaining nonlinear error parameters when the angular displacement single-frequency laser interferometer is turned on, and making corrections when measuring the angular displacement

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  • Nonlinear error correction method and device for angular displacement single-frequency laser interferometer

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[0024] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025]An angular displacement single-frequency laser interferometer nonlinear error correction device, in which a polarization beam splitter A2, a 1 / 4 wave plate B10 and a measuring mirror A8 are sequentially arranged on the output optical path of a frequency-stabilized laser 1, and the 1 / 4 wave plate B10 is located in the x and y planes, and is coaxial with the polarization beam splitter prism A2, the fast axis direction of the 1 / 4 wave plate B10 is 45° counterclockwise with the y axis, and the measuring mirror A8 is parallel to the 1 / 4 wave plate B10; 1 / 4 wave plate A3 and right-angle reflector 4 are arranged sequentially on the reflected optical path of described polarization beam splitter prism A2, and described 1 / 4 wave plate A3 is positioned at y, z plane, and coaxial with polarization beam splitter prism A2, 1 / 4 The fast axis direction of the w...

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Abstract

The invention provides a nonlinear error correcting method and device for an angular displacement type single-frequency laser interferometer, and belongs to the technical field of laser measurement. The method comprises the step of performing separating measurement for two-way measurement light beam strength through a light switch; extracting nonlinear error parameters in the related light signals; correcting DC deviation error and non-uniform amplitude of an orthogonal signal and other errors. With the adoption of the method and the device, the technical effects of extracting the nonlinear error parameters in the angular displacement type single-frequency laser interferometer as startup and quickly correcting the nonlinear error in the angular displacement type single-frequency laser interferometer on real time can be achieved.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a nonlinear error correction method and device of an angular displacement single-frequency laser interferometer. Background technique [0002] With the development of ultra-precision measurement technology, rapid ultra-precision measurement has received extensive attention and research. In the fields of precision and ultra-precision machining, microelectronic equipment, nanotechnology industrial equipment and national defense equipment, micro-displacement components, mobile platforms and The monitoring of the angle change of the lithography machine is becoming more and more important. Angular displacement laser interferometer has become a common method for precise measurement of modern angular displacement because of its high measurement accuracy and its ability to dynamically measure the relative swing angle in motion. The angular displacement laser interferomete...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
Inventor 胡鹏程朱静浩谭久彬
Owner HARBIN INST OF TECH
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