A kind of hydrogen passivation equipment of solar cell

Abstract

A hydrogen passivation unit for solar cells comprises a chamber; the chamber can be divided into a normal pressure chamber and a low pressure chamber by a vacuum door openable; the low pressure chamber is connected with a vacuum device; a conveyer which conveys solar cells between the normal pressure chamber and the low pressure chamber is mounted within the chamber; a control system and a cooling table are further mounted within the normal pressure chamber; a temperature-controlled heater which keeps stable temperature for the solar cells is mounted within the low pressure chamber. The hydrogen passivation unit further comprises a DC biasing device which biases the solar cells; the DC biasing device comprises an upper electrode and an upper electrode and a lower electrode mounted within the low pressure chamber and capable of relatively moving and contacting the solar cells to trigger power-on; both the upper electrode and the lower electrode are connected with a power controller which outputs contact voltage or constant current; the DC biasing device, the conveyer, the temperature-controlled heater, the vacuum device and the cooling table are all connected with the control system.

Description

technical field [0001] The invention relates to the field of solar cell manufacturing equipment, in particular to a device for realizing hydrogen passivation treatment on solar cells. Background technique [0002] The silicon crystals used in commercial crystalline silicon solar cells usually contain a large number of impurities and structural defects. These impurities and defects include: complexes formed by boron and oxygen, transition metal impurities, dislocations, grain boundaries, etc. As the recombination centers of photogenerated carriers, they reduce the lifetime of minority carriers in the cell matrix, thereby reducing the conversion efficiency of solar cells accordingly. [0003] Experiments have shown that hydrogen atoms in silicon crystals can react with most of the impurities and defects, passivate these recombination centers and reduce their recombination activity, thereby improving the electrical performance of solar cells. The hydrogen in the solar cell ca...

AI Technical Summary

Problems solved by technology

As the recombination centers of photogenerated carriers, they reduce the lifetime of minority carriers in the battery matrix, thereby reducing the conversion efficiency of solar cells accordingly.

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