Unlock instant, AI-driven research and patent intelligence for your innovation.

microscope stage

A technology for microscope slides and slides, applied in discharge tubes, electrical components, circuits, etc., can solve the problems of chips falling to the desktop or the ground, product contamination, damage, etc., to save time for focusing, improve efficiency, The effect of improving product yield

Active Publication Date: 2017-02-01
宁波安芯美半导体有限公司
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] When the chip is inspected, the slide table moves quickly, and the edge chip is easy to slip from the slide table to the desktop or the ground, causing product contamination, damage or scrap

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • microscope stage
  • microscope stage
  • microscope stage

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] Taking a 2-inch LED chip as an example, for further elaboration, the embodiment of the present invention includes a slide table 1, a first chip slot 2, a second chip slot 3, a chip taking hole 4, a protective plate fixing screw hole 7, a first dovetail Groove rail 8, first dovetail groove frame 9, bearing groove 10, bearing 11, second dovetail groove frame 12, first dovetail groove 13, second dovetail groove 14, anti-derailment cylinder 15;

[0045] Among them, the first chip groove 2 and the second chip groove 3 are milled on the loading table 1, the first chip groove 2 is used to fix the 2-inch LED chip, the depth of the first chip groove 2 is 0.4mm, and the diameter is 51mm; When inspecting a 2-inch LED chip, it can ensure that the 2-inch LED chip is fixed so that it does not move relative to each other when the slide table 1 moves rapidly.

[0046] There are protective plate fixing screw holes around the upper plane of the slide table 1, two 200mm×10mm×2mm protectiv...

Embodiment 2

[0053] Taking the inspection of a 4-inch LED chip as an example for further elaboration, the embodiments of the present invention include:

[0054] Carrier table 1, first chip slot 2, second chip slot 3, slice hole 4, protective plate fixing screw hole 7, first dovetail rail 8, first dovetail rack 9, bearing slot 10, bearing 11, The second dovetail groove frame 12, the first dovetail groove 13, the second dovetail groove 14, the anti-derailment cylinder 15;

[0055] Among them, the first chip groove 2 and the second chip groove 3 are milled on the slide table 1, the first chip groove 2 is used to fix a 2-inch LED chip, the depth of the first chip groove 2 is 0.35mm, and the diameter is 101mm; When inspecting a 2-inch LED chip, it can ensure that the 2-inch LED chip is fixed so that it does not move relative to each other when the slide table 1 moves rapidly.

[0056] There are protective plate fixing screw holes around the upper plane of the slide table 1, two 200mm×10mm×2mm ...

Embodiment 3

[0064] Taking simultaneous inspection of 2-inch and 4-inch LED chips as an example, further elaboration, the embodiment of the present invention includes a slide table 1, a first chip slot 2, a second chip slot 3, a chip-taking hole 4, and a protective plate fixing screw hole 7. The first dovetail groove rail 8, the first dovetail groove frame 9, the bearing groove 10, the bearing 11, the second dovetail groove frame 12, the first dovetail groove 13, the second dovetail groove 14, and the anti-derailment cylinder 15;

[0065] Among them, the first chip slot 2 and the second chip slot 3 are milled on the loading table 1, the first chip slot 2 is used to fix a 2-inch LED chip, the depth of the first chip slot 2 is 0.4mm, and the diameter is 51mm; The diameter of the two-chip groove 3 is 101 mm, and the depth is 0.35 mm. When the 2-inch and 4-inch LED chips are checked simultaneously, it can ensure that the 2-inch and 4-inch LED chips are fixed so that they can be placed on the sl...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a microscope stage, and relates to the field of semiconductor chip manufacturing. The microscope stage mainly comprises a stage (1) which is milled with a first chip slot (2) and / or a second chip slot (3). The periphery of the stage (1) is fixed to a protective plate through protective plate threaded holes (7). The two sides of the stage (1) are respectively provided with a first dovetail grooved rail (8), and each first dovetail grooved rail (8) is in sliding connection with a first dovetail groove (13). The bottom surfaces of the two ends of each first dovetail groove frame (9) are fixed to the top surfaces of the two ends of a corresponding second dovetail groove frame (12). Each second dovetail groove (14) is in sliding connection with a corresponding second dovetail grooved rail (17). The second dovetail grooved rails (17) are arranged on a second dovetail grooved rail frame (16), and the second dovetail grooved rail frame (16) is fixed to a microscope. The phenomenon of chip slip-off caused by fast moving of the stage can be prevented effectively, and the product yield is improved.

Description

technical field [0001] The invention relates to the field of semiconductor chip production and manufacturing, in particular to a microscope stage. Background technique [0002] In the manufacturing process of modern semiconductor chips, MESA lithography, ITO lithography, SIO 2 After photolithography and development, it is necessary to use special chemical liquid to remove the protective glue on the chip surface, and manual inspection is required after each photolithography and glue removal process. [0003] At present, workers' inspection tools are usually ordinary microscopes, and the microscope's slide table is also an ordinary open rectangular plate. [0004] When the chip is inspected, the carrier table moves rapidly, and the edge chip is easy to slip from the carrier table to the desktop or the ground, causing product contamination, damage or scrap. Contents of the invention [0005] (1) Solved technical problems [0006] Aiming at the deficiencies of the prior art...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/20
CPCH01J37/20
Inventor 丁维才冯靖吴化胜
Owner 宁波安芯美半导体有限公司