A kind of easily degradable environment-friendly silicon wafer cleaning agent and preparation method thereof
A silicon wafer cleaning agent, an environmentally friendly technology, applied in the directions of detergent compounding agents, detergent compositions, chemical instruments and methods, etc., can solve the problems of incompatibility of cleaning ability and biodegradability, difficulty in rinsing, and large production, etc. Achieving the effect of easy biodegradation, strong cleaning ability and less foam
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Embodiment 1
[0030] 74 parts by weight of deionized water;
[0031] 22 parts by weight of surfactants, including 6 parts by weight of alkyl glucose amide, 4 parts by weight of isomeric alcohol polyoxyethyl ether, 4 parts by weight of alcohol ether carboxylate, 5 parts by weight of alkyl diphenyl ether disulfonate, chelating 3 parts by weight of active surfactant;
[0032] 2 parts by weight of alkali, specifically 2 parts by weight of potassium hydroxide;
[0033] 1.5 parts by weight of dispersant, specifically 1.5 parts by weight of acrylic acid homopolymer dispersant;
[0034] 0.5 parts by weight of a defoamer, specifically 0.5 parts by weight of a silicone-modified polyether defoamer.
[0035]When cleaning this kind of silicon wafer cleaning agent, according to the standard of 3% concentration of the prepared silicon wafer cleaning agent, add the above-mentioned silicon wafer cleaning agent and deionized water in the cleaning tank, and heat it to 55 degrees Celsius to start cleaning. ...
Embodiment 2
[0037] 76 parts by weight of deionized water;
[0038] 19 parts by weight of surfactant, including 5 parts by weight of alkylglucamide, 3 parts by weight of isomeric alcohol polyoxyethyl ether, 4 parts by weight of alcohol ether carboxylate, 4 parts by weight of alkyl diphenyl ether disulfonate, chelating 3 parts by weight of active surfactant;
[0039] 3 parts by weight of alkali, specifically 3 parts by weight of potassium hydroxide;
[0040] 1 part by weight of dispersant, specifically 1 part by weight of acrylic acid homopolymer dispersant;
[0041] 1 part by weight of the defoamer, specifically 1 part by weight of a silicone-modified polyether defoamer.
[0042] When cleaning this kind of silicon wafer cleaning agent, according to the standard of 3% concentration of the prepared silicon wafer cleaning agent, add the above-mentioned silicon wafer cleaning agent and deionized water in the cleaning tank, and heat it to 55 degrees Celsius to start cleaning. It can clean ab...
Embodiment 3
[0044] 83 parts by weight of deionized water;
[0045] 14 parts by weight of surfactant, including 4 parts by weight of alkylglucamide, 2 parts by weight of isomeric alcohol polyoxyethyl ether, 3 parts by weight of alcohol ether carboxylate, 3 parts by weight of alkyl diphenyl ether disulfonate, chelating 2 parts by weight of active surfactant;
[0046] 1.5 parts by weight of alkali, specifically 1.5 parts by weight of potassium hydroxide;
[0047] 1 part by weight of dispersant, specifically 1 part by weight of acrylic acid homopolymer dispersant;
[0048] 0.5 parts by weight of a defoamer, specifically 0.5 parts by weight of a silicone-modified polyether defoamer.
[0049] When cleaning this kind of silicon wafer cleaning agent, according to the standard of 3% concentration of the prepared silicon wafer cleaning agent, add the above-mentioned silicon wafer cleaning agent and deionized water in the cleaning tank, and heat it to 55 degrees Celsius to start cleaning. It can ...
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