A surface treatment device

Abstract

The invention relates to the field of surface treatment, and discloses surface treatment equipment. The surface treatment equipment comprises a film formation cavity, a baffle, a metal piece, a detecting module and a treatment module, wherein the baffle is arranged in the film formation cavity; the metal piece is arranged on the surface of the baffle and is electrically isolated from the baffle; the detecting module is used for detecting a formed induced electromotive force of the metal piece when a magnetic field which is perpendicular to the metal piece and a current which is perpendicular to the direction of the magnetic field are applied to the metal piece; the treatment module is in signal connection with the detecting module; and thickness information of the metal piece is acquired according to the current, the magnetic field and electromotive force information. In the surface treatment equipment, the induced electromotive force is formed on the metal piece through the detecting module, and the treatment module acquires the thickness of the metal piece and thickness change conditions within a unit time in real time, so that the film formation speed on the metal piece can be acquired. Moreover, the film formation speed in a cavity of whole equipment and the service life of the baffle can be judged, the film formation speed in the film formation cavity can be monitored in real time, and the service life of the baffle can also be monitored. The surface treatment equipment is low in cost and easy to operate.

Description

technical field [0001] The invention relates to the field of surface treatment, in particular to a surface treatment device. Background technique [0002] At present, magnetron sputtering equipment is widely used in large-size thin film transistor liquid crystal display, organic light-emitting diodes, photovoltaics and many other fields. In actual sputtering, baffles are placed around the inner wall of the film forming chamber to prevent sputtering particles from contaminating the chamber. Body wall, after depositing particles to a certain thickness on the baffle, remove the baffle for cleaning. [0003] In the prior art, since the cavity is blocked by baffles, it is impossible to place sensors to monitor the film formation rate in real time. The actual film formation rate needs to be measured after the substrate comes out of the cavity. When the problem is detected, losses have already been caused. In addition, the life of the baffle is often estimated by experience, and t...

AI Technical Summary

Problems solved by technology

[0003] In the prior art, since the cavity is blocked by the baffle, it is impossible to place sensors to monitor the film formation rate in real time. The actual film formation rate needs to be measured after the substrate comes out of the cavity. When the problem is detected, the loss has already been caused

In addition, the life of the baffle is often estimated based on experience, and the error is relatively large. If the baffle is replaced in advance, the use of the baffle will be insufficient, resulting in an increase in operating costs. If the life is exceeded and replaced, the film attached to the baffle will fall off , resulting in equipment downtime or product yield decline

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