Two-dimensional magnetic field probe table measuring system

Abstract

The invention belongs to the technical field of physics and semiconductor measurement, and particularly relates to a two-dimensional magnetic field probe table measuring system. The measuring system comprises a base, a two-dimensional magnetic field electromagnet, an object table clamping plate arranged in the center of the magnetic pole of the electromagnet and fixed on the base, a probe table and a microscopic measuring device, wherein an opening is formed in the middle of the probe table, a plurality of direct-current and high-frequency probe seats and probes are arranged around the opening, the probes are in contact with samples on the object table clamping plate through the opening, and a plurality of direct-current and high-frequency instruments are connected with the probes to measure the samples in the magnetic field environment. According to the integrated and intelligent two-dimensional magnetic field probe table measuring system, the measurement function of the two-dimensional magnetic field probes can be realized; more probe seats and probes can be placed, so that relatively complex measurement in the magnetic field environment can be realized; the mechanical vibration is small, the flexibility is good, the cost performance is high, and the application scenes are wide.

Description

technical field [0001] The invention belongs to the technical field of physics and semiconductor measurement, and specifically relates to a two-dimensional magnetic field probe station measurement system. Background technique [0002] The probe station is a widely used non-destructive testing method in the field of physics and semiconductors. It can measure the electrical properties, optoelectronic properties, and high-frequency properties (radio frequency, microwave, millimeter wave, terahertz wave) of materials or devices. a platform. Magnetic field probe stations can provide magnetic fields and apply them to materials or devices to study their related properties under magnetic fields. Typical applications include magnetism, spintronics, semiconductor physics and devices, quantum devices, etc. [0003] At present, magnetic field probe stations are widely used, but they have shortcomings: the existing magnetic field probe stations mainly provide a magnetic field in one dim...

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Problems solved by technology

[0004] The purpose of the present invention is to propose a two-dimensional magnetic field probe station measurement system to solve the problem that the existing magnetic field probe station cannot change the direction of the magnetic field and can place fewer probe bases and probes, and can effectively change the direction of the magnetic field. It is necessary to set the number of probe bases and probes, which can be widely used in various scenarios of physical and semiconductor measurement

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