Miniaturized hundred-grade laminar flow zone
A technology of 100-level laminar flow and airflow, which is applied in the field of small and simplified 100-level laminar flow belts, can solve the problems of one-time investment and high operating costs of 100-level laminar flow belts, reduce the risk of pollution, reduce heat load, and improve The effect of construction and demolition speed
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[0042] The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.
[0043] It should be understood that terms such as "having", "comprising" and "including" as used herein do not entail the presence or addition of one or more other elements or combinations thereof.
[0044] combine Figure 1 to Figure 3, there are some defects and drawbacks in the existing 100-level laminar flow zone, which are summarized as follows:
[0045] 1). In order to create a clean environment with relatively stable airflow and little interference, the 100-level laminar flow belt occupies a relatively large space: it is isolated from the surrounding space by dozens of FFUs through supporting frames and transparent enclosures. From a physical point of view, it can be regarded as a super-large equipment for the peripheral clean area. No matter where it is installed in...
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