Solar spectrum selective absorptive coating and manufacturing method thereof

A technology for absorbing coatings and solar spectra, applied in coatings, solar thermal devices, solar thermal power generation, etc., can solve the problems of lower absorptivity of film systems, achieve low thermal radiation rate, increase solar spectral absorptivity, and process stability high effect

Inactive Publication Date: 2015-10-14
TAHOE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in use, it was found that when the operating temperature of the spectrally selective absorbing coating with this structure is higher than 250°C, there is a problem that the film system starts to tear from the absorbing layer Ge, resulting in a significant decrease in the film system absorption rate.

Method used

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  • Solar spectrum selective absorptive coating and manufacturing method thereof
  • Solar spectrum selective absorptive coating and manufacturing method thereof
  • Solar spectrum selective absorptive coating and manufacturing method thereof

Examples

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preparation example Construction

[0039] The preparation of the absorbing layer is to prepare the absorbing layer Ti and Ge sequentially on the above-mentioned infrared reflective layer by (pulse) DC magnetron sputtering method. %above).

[0040] The preparation of the anti-reflection layer is to prepare the anti-reflection layer on the above-mentioned absorbing layer by (pulse) DC reactive magnetron sputtering. %wt, purity over 99.7%).

Embodiment 1

[0042] Table 1 is prepared by magnetron sputtering method (SiO 2 / TiO 2 / Ge / Ti / Al / substrate) process-controlled thickness of each monolayer in the spectrally selective absorption coating.

[0043] The process control thickness of each monolayer film of table 1 embodiment one

[0044]

[0045] Carry out embodiment one coating preparation according to above-mentioned preparation method, concrete operation steps are as follows:

[0046]1) Cleaning of the glass substrate: firstly, use a neutral detergent to clean the glass substrate; then, in the film feeding chamber of the coating equipment, bombard the surface of the glass substrate with a radio frequency ion source for secondary cleaning, and the process parameters are set as follows: radio frequency The sputtering power of the power supply is 200w, the flow rate of the working gas Ar (purity 99.99%) is 45sccm, the working pressure is 9.8×10-2mTorr, and the sputtering time is 360s.

[0047] 2) The glass substrate is trans...

Embodiment 2

[0055] Table 2 is prepared by magnetron sputtering method (SiO 2 / TiO 2 / Ge / Al / substrate) process-controlled thickness of each monolayer in the spectrally selective absorbing coating.

[0056]

[0057] The process control thickness of each monolayer film of table 2 embodiment two

[0058] Carry out embodiment two coating preparation according to above-mentioned preparation method, concrete operation steps are as follows:

[0059] 1) Cleaning of the glass substrate: firstly, use a neutral detergent to clean the glass substrate; then, in the film feeding chamber of the coating equipment, bombard the surface of the glass substrate with a radio frequency ion source for secondary cleaning, and the process parameters are set as follows: radio frequency The sputtering power of the power supply is 200w, the flow rate of the working gas Ar (purity 99.99%) is 45sccm, the working pressure is 9.8×10-2mTorr, and the sputtering time is 360s.

[0060] 2) The glass substrate is transpor...

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Abstract

The invention discloses a solar spectrum selective absorptive coating. The structure of the coating sequentially comprises the following parts from a substrate to an air interface: the substrate 1, an infrared reflection layer 2, absorption layer metal 31 and semiconductor absorption layer germanium with heat matching functions and an antireflection layer 4 which comprises a high refraction index medium layer 41 and a low refraction index medium layer 42. The solar spectrum selective absorptive coating has excellent spectrum selectiveness, and the absorption-reflection transition region is steep; the solar spectrum selective absorptive coating has a high absorption ratio alpha in the solar spectral range of 0.3 to 2.5 micrometers, and has a very low radiance ratio epsilon in the thermal radiation infrared region of 2 to 50 micrometers, and the ratio of alpha to epsilon is much higher than that of present commercial products, so that the solar spectrum selective absorptive coating is applicable to low-power focused medium-temperature solar thermal collectors. Furthermore, the manufacturing process is simple, and the requirement on coating equipment is low, so that the solar spectrum selective absorptive coating is suitable for large-scale low-cost production. With the SiO2 / TiO2 / Ge / Ti / Al structure disclosed by the invention, compared with a coating having a SiO2 / TiO2 / Ge / Al structure with an absorption layer manufactured singly from Ge, the coating disclosed by the invention is advantaged in that the thermal stability of the coating is obviously improved, and the coating has higher absorptivity and similar radiance.

Description

technical field [0001] The invention relates to a spectrally selective absorbing coating and a preparation method thereof, in particular to a solar spectrum selectively absorbing coating based on a base layer, an infrared reflective layer, a thermally matched metal absorbing layer, a semiconductor absorbing layer and an antireflection layer and its preparation method. Background technique [0002] The solar spectrum selective absorption coating is the core material to realize solar photothermal conversion. On the one hand, it has a high absorption rate in the solar light band (0.3μm-2.5μm), on the other hand, it has a high absorption rate in the infrared thermal radiation band (2.5 μm-50μm) has a low absorption rate, that is, emissivity, which inhibits heat dissipation by infrared radiation. One of the important indicators to measure the selective absorption performance is the ratio of the solar spectral absorptivity α to the infrared radiation rate ε(T), α / ε. [0003] At ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F24J2/48B32B15/04C23C14/35C23C14/14C23C14/08C23C14/10
CPCC23C14/021C23C14/08C23C14/165C23C14/185F24S70/225F24S70/30Y02E10/40C23C14/0036C23C14/022C23C14/35
Inventor 项晓东刘静汪洪
Owner TAHOE TECH
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