80results about How to "Low extinction coefficient" patented technology

The present invention provides PECVD methods for forming stable and hermetic ashable hard masks (AHMs). The methods involve depositing AHMs using dilute hydrocarbon precursor gas flows and/or high LFRF/HFRF ratios. In certain embodiments, the AHMs are transparent and have high etch selectivities. Single and dual layer hermetic AHM stacks are also provided. According to various embodiments, the dual layer stack includes an underlying AHM layer having tunable optical properties and a hermetic cap layer.

A method of forming a transparent hydrocarbon-based polymer film on a substrate by plasma CVD includes: introducing a main gas consisting of a hydrocarbon gas (C_αH_β, wherein α and β are natural numbers) and an inert gas at a flow ratio (R) of C_αH_β/inert gas of 0.25 or less into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-based polymer film on the substrate by plasma polymerization of the gas at a processing temperature (T) wherein T≦(−800R+500).

The invention relates to an aromatic amine compound and an organic light-emitting device (OLED) containing the compound. The structural formula of the aromatic amine compound is as shown in the following description. The aromatic amine compound involved in the invention has relatively high refractive index, and can improve the light extraction efficiency of a top-emitting organic photoelectronic device when used as the capping layer of an organic light-emitting display device. The aromatic amine compound involved in the invention has relatively small extinction coefficient, and barely absorbs blue light, thereby facilitating the improvement of the luminous efficiency; meanwhile, the aromatic amine compound can effectively block water and oxygen in an external environment, and protects an OLED display panel from being eroded by the water and the oxygen, and the OLED can achieve high efficiency and long life. Compared with a known OLED, the OLED involved in the invention can greatly improve the light extraction efficiency because a material for an organic EL element with high refractive index, and excellent film stability and durabilityis used as a material for the covering layer. The organic light-emitting device involved in the invention can achieve high efficiency and long life.

A preparation method of an oxygen-stabilized yttrium fluoride film relates to a preparation method of an yttrium fluoride film. The invention solves the problems of optical constant distortion due to the lack of fluorine, caduceus film, unstable structure and poor optical performance in present preparation methods of the yttrium fluoride film. The preparation method provided by the invention comprises the following steps of: washing a ZnS substrate with the use of acetone, alcohol and deionized water, displacing the ZnS substrate on a rotating heating stage in a magnetron sputtering vacuum container, followed by vacuum-pumping and heating; blowing Ar gas into the vacuum container and carrying out anti-powder sputtering cleaning on the surface of the ZnS substrate; vacuumizing and heating after film coating, and cooling to room temperature to finish the whole process. The oxygen-stabilized yttrium fluoride film is prepared by the magnetron sputtering method, thus improving the optical constant distortion due to the lack of fluorine and simultaneously preventing the shedding and rupture of the film. The oxygen-stabilized yttrium fluoride film has good optical performance, low refractive index and excellent stability; and the extinction coefficient of the film is greatly reduced and the film is firmly adhered.

The invention provides an azacyclo-compound having the structure shown in the chemical formula 1. In the formula 1, X1 to X6 independently represent N or C atoms, at least one of X1 to X6 is an N atom, m and n independently represent 0, 1 or 2, m+n is greater than 1, R1 represents a hydrogen atom, a C1-C10 linear or branched alkyl group, a substituted or unsubstituted phenyl group, a diphenyl group, a terphenyl group, a pyridyl group, a naphthyl group or an anthracenyl group, Ar is selected from a dimethyl fluorene group, a phenyl group and a carbazolyl group, and Ar1 and Ar2 independently represent a substituted or unsubstituted benzimidazole group. The azacyclo-compound has a high refractive index, when the azacyclo-compound is used as a CPL cap layer of an organic light-emitting and display device (such as an OLED), light extraction efficiency and luminous efficiency of the top emission organic photoelectric device can be improved, and the angular dependence of OLED device illumination is reduced. The azacyclo-compound has a small extinction coefficient in the blue region and almost no absorption of blue light and improves luminous efficiency.

The invention discloses coated glass being ultrahigh in visible light transmittance and a preparation method thereof and belongs to the technical field of coated glass. The coated glass includes a glass substrate, and includes following layers outwardly from the glass substrate successively: a first silicon nitride film layer, a first niobium oxide film layer, a zinc aluminum oxide film layer, a silver film layer, a nickel chromium oxide film layer, a zinc tin antimony oxide film layer, a second niobium oxide film layer, a second silicon nitride film layer and a titanium oxide film layer. The coated glass is low in emissivity and is ultrahigh in the visible light transmittance.

The present invention discloses a high refractive index benzoheterocycle compound represented by a formula (I), wherein X1 and X2 are respectively and independently selected from O or S; R1-R4 are respectively and independently selected from hydrogen, deuterium, substituted or unsubstituted C1-C10 alkyl, substituted or unsubstituted C6-C30 aryl, and substituted or unsubstituted C2-C30 heterocyclicgroups; and at least one of R1-R4 is not hydrogen or deuterium. Compared with the prior art, the benzoheterocycle compound provided by the invention has a relatively high refractive index, and can beused as an organic covering layer material to effectively improve the external quantum efficiency of an organic light-emitting device and relieve the light-emitting angle dependence of the organic light-emitting device; moreover, the benzoheterocycle compound has a relatively small extinction coefficient in a blue light region and hardly absorbs blue light, so that the light-emitting efficiency is improved; furthermore, the benzoheterocycle compound has a relatively deep LUMO energy level, can be used as an electron transport material, and is beneficial to light extraction of a bottom emitting device.

The invention discloses hyacinth-like coated glass and a preparation method thereof. The hyacinth-like coated glass comprises a glass substrate, one layer or multi-layers of functional film layers with which the surface of the glass substrate is coated, and a hyacinth-like-mixed and doped film layer with which the surface of the functional film layer is coated, wherein each functional film layer is a tempered low-radiation film layer, or a non-tempered low-radiation film layer or a solar control film layer. The coated hyacinth-like doped film has the high stability, the high temperature resistance, the wear resistance and the high chemical resistance. After glass of the hyacinth-like film layer is tempered, the transmission can be improved, the glass is not burnt like diamond-like carbon, the tempered glass can be well protected in the glass transport and storage processes, the scratch is avoided, and the oxidization is delayed.

The invention discloses a compound. The structure of the compound is shown as the following general formula, wherein definitions of substituent groups in the formula are shown in the specification. The compound provided by the invention can be used as a CPL cap layer, has a relatively high refractive index, and can effectively improve the external quantum efficiency of an organic photoelectric device.

A semiconductor fabrication method is disclosed. A substrate having thereon a plurality of semiconductor elements are provided. A dielectric layer is formed on the substrate. A plurality of openings is etched into the dielectric layer to respectively reveal the semiconductor elements. A material layer is coated on the substrate and the material layer fills into the openings. The material layer is then subjected to exposure and development processes to remove a portion of the material layer, thereby forming a material pattern. The material pattern is then polished by chemical mechanical polishing.

The invention, which belongs to the technical field of microelectronics, relates to a chalcogenide phase-change material with a transparent communication waveband and a preparation method thereof. Thegeneral chemical formula of the components of the chalcogenide phase-change material is GezSb2Tey-S (Se) x, wherein the x is larger than 0 and is less than or equal to 4, the y is larger than or equal to 0 and is less than or equal to 4, and the z is larger than or equal to 0 and is less than or equal to 2. The material can be quickly and reversibly converted between a high refractive index (amorphous state) and a low refractive index (crystalline state), and is a novel phase-change material. More importantly, compared with the traditional Ge2Sb2Te5, the chalcogenide phase-change material disclosed by the invention has extremely low optical absorption in a communication waveband range, rapid reversible phase change can be realized under the action of a laser pulse or a voltage pulse, anda relatively large refractive index difference is kept before and after phase change. Moreover, the material system maintains stable non-volatility, and stably maintains the original state without external excitation, so that a problem of high absorption loss of the traditional phase-change material in the communication waveband is solved; and a novel active regulation and control high-speed communication device is realized.