The invention discloses a preparation method for a high-
refractive index hydrogenated
silicon film, the high-
refractive index hydrogenated
silicon film, a light filtering lamination and a light filtering piece and relates to the technical field of optical films. The preparation method comprises the following steps that firstly, by means of magnetic controlled Si target
sputtering, Si deposits on abase body, and a
silicon film is formed; and secondly, the hydrogenated silicon film containing
oxygen is formed through the silicon film under the environment where activated
hydrogen and
active oxygen are contained, the amount of the
activated oxygen accounts for 4%-99% of the total amount of the activated
hydrogen and the
activated oxygen, or, the hydrogenated silicon film containing nitrogenis formed through the silicon film under the environment where the activated
hydrogen and the activated
nitrogen are contained, and the amount of the activated
nitrogen accounts for 5%-20% of the total amount of the activated hydrogen and the activated
nitrogen. According to the preparation method,
sputtering and a reaction are separately conducted, firstly, by means of magnetic controlled Si target
sputtering, Si deposits on the base body, then, plasmas of the activated hydrogen and the
activated oxygen / nitrogen react with the silicon to obtain the
oxygen or nitrogen containing SiH, the poisoning problem of a target is avoided, and the SiH film has a relatively high
refractive index and relatively low absorption.