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A Miniature Fluxgate Sensor with Porous Iron Core Structure

A technology of fluxgate sensor and porous structure, which is applied to the magnetic field measurement and the size/direction of the magnetic field using the principle of magnetic flux control, which can solve the problems of low current efficiency, serious magnetic flux leakage, and reduction, so as to reduce the excitation current, Effects of improving efficiency and reducing power consumption

Inactive Publication Date: 2017-10-20
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the variable cross-sectional area iron core structure miniature fluxgate excitation coil and induction coil described in the literature are located at different positions of the iron core and the distance is far away. Severe magnetism and low current efficiency hinder the further reduction of sensor power consumption

Method used

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  • A Miniature Fluxgate Sensor with Porous Iron Core Structure
  • A Miniature Fluxgate Sensor with Porous Iron Core Structure
  • A Miniature Fluxgate Sensor with Porous Iron Core Structure

Examples

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Embodiment 1

[0028] Example 1: Micro Fluxgate with Honeycomb Holes

[0029] Refer to attached figure 1 , 2, 3, The microfluxgate sensor with porous iron core structure in this embodiment includes a silicon substrate with a silicon dioxide insulating layer to provide support for the entire structure. Double iron core structure is adopted, the two ends of the iron core are connected to form a ring shape, and the iron core has hexagonal holes arranged densely in the vertical iron core axis and spaced apart in the parallel iron core axial direction. These holes divide the iron core into Multiple sets of local variable cross-sectional area structures. Such an iron core layer is surrounded by a three-dimensional solenoid excitation coil and an induction coil perpendicular to it, and polyimide is used as an insulating layer and a protective layer between the induction coil and the iron core. The induction coil and the excitation coil are respectively connected to pads on the substrate.

[003...

Embodiment 2

[0049] Embodiment 2: Miniature Fluxgate with Square Hole

[0050] Refer to attached Figure 5 , 6, 7, The micro-fluxgate sensor with porous iron core structure in this embodiment includes a silicon substrate with a silicon dioxide insulating layer to provide support for the entire structure. Double iron core structure is adopted, and the two ends of the iron core are connected to form a ring shape. The iron core has quadrilateral holes arranged densely in the vertical iron core axis and spaced in the parallel iron core axial direction. These holes divide the iron core into multiple groups. Local variable cross-sectional area structure. Such an iron core layer is surrounded by a three-dimensional solenoid excitation coil and an induction coil perpendicular to it, and polyimide is used as an insulating layer and a protective layer between the induction coil and the iron core. The induction coil and the excitation coil are respectively connected to pads on the substrate.

[00...

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Abstract

The invention discloses a miniature magnetic fluxgate sensor adopting a porous iron core. The silicon substrate (1) is used as the substrate support layer; the excitation coil (2) and the induction coil (3) adopt a three-dimensional solenoid structure, and the upper and lower layers are connected by through holes (4) at both ends; the iron core (5) is made of soft magnetic material , Porous structure, the holes on the iron core divide the iron core to form multiple groups of local variable cross-sectional area structures; polyimide (6) is used as the insulating layer between layers; the excitation coil corresponds to the "no hole" position, and the induction coil corresponds to In the "hole" position, alternate winding; the excitation wire and the induction coil are led out through the pads (7, 8). The miniature fluxgate sensor involved in the invention can effectively reduce the power consumption of the miniature fluxgate and improve the sensitivity.

Description

Technical field: [0001] The invention relates to a fluxgate sensor, in particular to a miniature fluxgate sensor prepared by micro-electromechanical (MEMS) technology. Background technique: [0002] Fluxgate is a magnetic field component sensor with very good comprehensive performance. Miniaturized fluxgates have the characteristics of small size, light weight, and simple structure, but there are problems such as high power consumption and difficulty in heat dissipation due to small size and high power consumption. [0003] refer to Figure 9 , the document "A fully integrated ring-type fluxgate sensor based on alocalized core saturation method. IEEE Transactions on Magnetic, 2007, 43(4): 1040-1043" discloses a miniature fluxgate sensor with variable cross-sectional area iron core structure . The annular soft magnetic material is used as the iron core 1, and the cross-sectional area 2 of the iron core corresponding to the induction coil is reduced to one-tenth of the cross...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/04
Inventor 刘诗斌郭博杨尚林
Owner NORTHWESTERN POLYTECHNICAL UNIV