A Miniature Fluxgate Sensor with Porous Iron Core Structure
A technology of fluxgate sensor and porous structure, which is applied to the magnetic field measurement and the size/direction of the magnetic field using the principle of magnetic flux control, which can solve the problems of low current efficiency, serious magnetic flux leakage, and reduction, so as to reduce the excitation current, Effects of improving efficiency and reducing power consumption
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Embodiment 1
[0028] Example 1: Micro Fluxgate with Honeycomb Holes
[0029] Refer to attached figure 1 , 2, 3, The microfluxgate sensor with porous iron core structure in this embodiment includes a silicon substrate with a silicon dioxide insulating layer to provide support for the entire structure. Double iron core structure is adopted, the two ends of the iron core are connected to form a ring shape, and the iron core has hexagonal holes arranged densely in the vertical iron core axis and spaced apart in the parallel iron core axial direction. These holes divide the iron core into Multiple sets of local variable cross-sectional area structures. Such an iron core layer is surrounded by a three-dimensional solenoid excitation coil and an induction coil perpendicular to it, and polyimide is used as an insulating layer and a protective layer between the induction coil and the iron core. The induction coil and the excitation coil are respectively connected to pads on the substrate.
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Embodiment 2
[0049] Embodiment 2: Miniature Fluxgate with Square Hole
[0050] Refer to attached Figure 5 , 6, 7, The micro-fluxgate sensor with porous iron core structure in this embodiment includes a silicon substrate with a silicon dioxide insulating layer to provide support for the entire structure. Double iron core structure is adopted, and the two ends of the iron core are connected to form a ring shape. The iron core has quadrilateral holes arranged densely in the vertical iron core axis and spaced in the parallel iron core axial direction. These holes divide the iron core into multiple groups. Local variable cross-sectional area structure. Such an iron core layer is surrounded by a three-dimensional solenoid excitation coil and an induction coil perpendicular to it, and polyimide is used as an insulating layer and a protective layer between the induction coil and the iron core. The induction coil and the excitation coil are respectively connected to pads on the substrate.
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