The invention relates to a method for predicting a change in a value ([
lambda] i) of a layer characteristic or a
local variable on a support location (5 ') on which a layer is deposited on a substrate (7). If the independent
processing parameter (qi) of one bearing position (5 ') varies, the value of the
independent parameter (qi based on the bearing position (5') varies, and the value (
lambda i) at the other bearing position (5 ') also varies. The method suggests depositing a starting layer, i.e. Formula (I), with independent starting parameters, and depositing a test layer, i.e. Formula (I), with different test parameters therefrom. The sensitivity matrix (Si, j) can be formed from determined starting values, formulae (II), (II) and test values, formulae (III), (III), the elements of which represent, respectively, the effect of the variation of each individual parameter (qI) on each value ([
lambda] i) of the layer characteristic or
local variable. A correction parameter ([
delta] qi) can also be calculated by reversing a sensitivity matrix (Si, j) in such a way that an
independent parameter (q) is preset and a preset target value is achieved by means of these independent parameters, i.e. Formulae (IV), (IV), # imgabs0 #