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Femtosecond laser scanning power regulation device and method and femtosecond laser processing system

A technology of power regulation and femtosecond laser, which is applied to lasers, laser welding equipment, laser components, etc., can solve the problem of difficult adjustment of laser power with scanning speed

Active Publication Date: 2015-10-14
JILIN UNIV
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Problems solved by technology

[0004] Embodiments of the present invention provide a device and method for linearly adjusting laser power with scanning speed during femtosecond laser processing, which mainly solves the problem of difficult adjustment of laser power with scanning speed when using femtosecond laser for high-quality direct line writing , and improve power regulation flexibility

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  • Femtosecond laser scanning power regulation device and method and femtosecond laser processing system

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Embodiment Construction

[0012] The technical solution of the present invention will be further specifically described below through the embodiments and in conjunction with the accompanying drawings. In the specification, the same or similar reference numerals designate the same or similar bottom members. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention, but should not be construed as a limitation of the present invention.

[0013] figure 1 is a schematic diagram of a device for linearly adjusting femtosecond laser power with scanning speed according to an exemplary embodiment of the present invention. figure 2 is a schematic diagram of a pulse modulation signal driving a modulator to select laser pulses according to an exemplary embodiment of the present invention.

[0014] The femtosecond laser source 1 uses a Tsunami femtosecond oscillator from Spectra-Ph...

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Abstract

The invention provides a femtosecond laser scanning power regulation device and method and a femtosecond laser processing system. The device comprises a laser modulator which is used to modulate laser from a laser source, a pulse width modulation signal generator which is used to provide a pulse width modulation signal with duty cycle for the laser modulator, and a controller which is used to communicate with the pulse width modulation signal generator to provide the duty cycle for the pulse width modulation signal generator. The duty cycle is the ratio of the current laser scanning linear velocity to the maximum laser scanning linear velocity. The femtosecond laser scanning power regulation method comprises the steps that the laser modulator is provided; the laser modulator modulates the laser from the laser source; and the pulse width modulation signal with the duty cycle is provided for the laser modulator, wherein the duty cycle is the ratio of the current laser scanning linear velocity to the maximum laser scanning linear velocity.

Description

technical field [0001] Embodiments of the present invention belong to the field of femtosecond laser micro-nano processing, and in particular, relate to a femtosecond laser scanning power control device and method, and a femtosecond laser processing system. technical background [0002] Due to its ultra-fast time characteristics and ultra-high peak power, the femtosecond laser can quickly and accurately confine energy to a specific area in the interaction with matter, and can achieve extremely high processing accuracy. Its characteristics are: applicable to a wide range of materials, suitable for the processing of difficult-to-process materials; non-mask technology, suitable for non-planar processing; high precision, suitable for the preparation of three-dimensional complex structures. [0003] In some occasions, in order to ensure the quality of laser processing, it is necessary to adjust the power of the laser according to the speed of laser scanning. During the decelerat...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/10B23K26/00B23K26/70
Inventor 孙洪波于颜豪陈岐岱姜俊
Owner JILIN UNIV
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