A vibration intelligent compensation mechanical arm, robot and vibration measurement method thereof

Abstract

The invention discloses an intelligent vibration compensation mechanical arm, a robot and a vibration measurement method of the vibration intelligent compensation mechanical arm, and belongs to the field of mechanical engineering. The intelligent vibration compensation mechanical arm comprises a body frame, a piezoelectric ceramic actuator and a strain sensor. The body frame is of an integrally-machined truss-like structure. The strain sensor is installed on the body frame and used for measuring the deformation condition of the body frame in the movement process and feeding back a measurement result to a control system. The piezoelectric ceramic actuator is installed in the body frame and used for compensating for the deformation of the body frame in the moving processing under the action of the control system. The mechanical arm achieves the mechanical arm vibration inhibition in the high-speed and high-precision light-load mechanical field and aims to achieve active vibration inhibition on the mechanical arm by installing intelligent vibration detection and compensation elements in the mechanical arm, and finally the executing precision of the system is improved.

Description

technical field [0001] The invention relates to a mechanical arm, in particular to a vibration intelligent compensation mechanical arm. [0002] The present invention also relates to a robot equipped with the above-mentioned vibration intelligent compensation mechanical arm. [0003] The present invention also relates to a vibration measurement method of the above-mentioned vibration intelligent compensation mechanical arm. Background technique [0004] At present, the general accuracy of industrial robots is 0.1mm, but in light-load, high-speed precision applications such as IC packaging and laser welding, robots need to be able to achieve an accuracy of more than 0.03mm. The main reason is that the mechanical arm generates elastic vibration during high-speed movement. Although the high-rigidity lightweight material is used, due to the inherent characteristics of the material and the dynamic load excitation during the driving process, especially in the high-speed emergency...

AI Technical Summary

Problems solved by technology

In light-load applications with high-acceleration, high-speed working conditions and high-precision positioning requirements, the above solutions have the following disadvantages: The disadvantage of method (1) is that the design of the high-stiffness manipulator body has a limited scope of application, and it is not suitable for multiple pose changes. The consistent adaptability of the robotic arm is poor

In addition, for the application field of high-speed robots, the inertial influence of the manipulator cannot be ignored, resulting in limited design stiffness of the manipulator; the disadvantage of method (2) is that it increases the motion execution time and reduces the production efficiency; the method (3) has the The disadvantage is that the position and posture of the robot arm will change greatly during the movement of the robot, and the dynamic characteristic parameters such as the moment of inertia of each segment of the robot arm will change greatly, and the digital filter cannot adapt to the situation where the dynamic characteristics change.

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