Humidity sensor device based on film volume acoustic wave resonator

A thin-film bulk acoustic wave and humidity sensing technology, which is applied in the field of sensors, can solve the problems of multiple noises and errors, increase the difficulty of signal processing, occupy device space, etc., achieve the goal of increasing acoustic loss, improving measurement accuracy, and realizing real-time monitoring Effect

Active Publication Date: 2015-10-21
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Description
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Problems solved by technology

This not only requires the use of an additional test chip, which takes up device space, but also increases the difficulty of post-signal processing and introduces more noise and errors.

Method used

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  • Humidity sensor device based on film volume acoustic wave resonator
  • Humidity sensor device based on film volume acoustic wave resonator
  • Humidity sensor device based on film volume acoustic wave resonator

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Embodiment Construction

[0037] The humidity sensor device based on the film bulk acoustic resonator of the present invention avoids the adverse influence of external factors on the accuracy of the humidity sensor by improving the design of the top electrode, the selection of the humidity sensitive film, the increase of the heating element and the temperature sensor, etc., and improves the accuracy of the humidity sensor. The sensing ability of the humidity sensor.

[0038] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0039] In one exemplary embodiment of the present invention, a thin film bulk acoustic resonator based humidity sensing device is provided. Figure 2A and Figure 2B are respectively a cross-sectional view and a top view of the humidity sensor device according to an embodiment of th...

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Abstract

The invention provides a humidity sensor device based on a film volume acoustic wave resonator. The humidity sensor device comprises a supporting structure (10) and a humidity measuring structure (20) formed on the supporting structure (10). The humidity measuring structure (20) comprises a bottom electrode (21) formed on the supporting structure (10), a humidity sensing film (22) formed on the bottom electrode (21), and a top electrode (23) formed on the humidity sensing film, and a plurality of micro holes are distributed in the top electrode (23) so that part of area of the humidity sensing film (22) can be communicated with the outside environment. A resonance unit is formed by the bottom electrode, the humidity sensing film and the top electrode. The micro holes are distributed in the top electrode of the humidity sensor device, water molecules in the environment atmosphere reach the surface of the humidity sensing film through the micro holes, the induction capability of the device to the humidity cannot be greatly affected, meanwhile, acoustic losses cannot be increased, and noise is not increased.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a humidity sensor based on a thin-film bulk acoustic wave resonator. Background technique [0002] Humidity monitoring has a wide range of applications in fields such as meteorology, environmental monitoring, smart home and industrial production control. The trend of system miniaturization has promoted the development of capacitance, resistance and acoustic wave micro-device humidity sensors, that is, selecting humidity-sensitive materials that can interact with water vapor in the air, and characterizing the environmental humidity by measuring changes in its capacitance, resistance or resonance characteristics. Acoustic resonant systems provide frequency information that can be measured with higher precision digital systems than resistive and capacitive sensors, and thus have received greater attention. [0003] Film Bulk Acoustic Resonator (FBAR) is a very high-frequency resona...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/26
Inventor 赵湛张萌颖杜利东方震
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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