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Motor unit for a wire saw device and wire saw device employing the same

A motor and wire saw technology, applied in the field of wire saw devices, can solve the problems of loss of production process accuracy, mechanical parts fatigue, fatigue and mechanical stress weakening

Inactive Publication Date: 2015-10-28
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, mechanical loads tend to cause friction and generate heat, which, for example, in rolling bearings, together with rather high rotational speeds of the drive system can lead to fatigue and eventual failure of mechanical parts
Fatigue and mechanical stress can also weaken metal parts and their surfaces and can thus lead to a loss of precision in the production process

Method used

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  • Motor unit for a wire saw device and wire saw device employing the same
  • Motor unit for a wire saw device and wire saw device employing the same
  • Motor unit for a wire saw device and wire saw device employing the same

Examples

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Embodiment approach 1

[0038] Embodiments generally relate to a motor unit comprising a motor, a shaft and a housing in which the former two are provided. The motor may be a torque motor. The stator of the motor is mechanically mounted into the housing of the motor unit. The stiffness of the system is also increased due to the direct mechanical coupling between the motor rotor and the shaft, without elastic coupling or belt drive. The housing may contain roller bearings, which in embodiments are provided without inner rings and axial thrust bearings. Using roller bearings without an inner ring allows for better accuracy and control of the deflection of the shaft. In an embodiment, the shaft encoder can be mounted on the shaft with high deflection accuracy. In an embodiment, although the motor rotor transmits additional thermal energy to the shaft to which it is mounted, the shaft is internally cooled, which allows for better control of the motor unit shaft temperature. Cooling also allows minimi...

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Abstract

A motor unit (10) for a wire saw device comprises a housing (15), a shaft (20) being rotatably provided in the housing (15), a motor (25) having a stator (26) and a rotor (27), wherein the stator is fixed to the housing (15), and wherein the rotor (27) is mounted to the shaft (20) and has the same rotational axis (A) as the shaft, and wherein the shaft and the motor (25) are located in the housing (15). Further, a use of such a motor unit and a wire saw device (100) including such a motor unit (10) is proposed.

Description

technical field [0001] Embodiments of the present invention relate to a motor unit for a wire saw, and to a wire saw device using the motor unit. The invention relates in particular to motor units for photovoltaic and / or semiconductor applications, or other electronics applications such as sapphire crystals for display production, and wire saw devices using the motor units. Background technique [0002] Wire saw devices are used in the photovoltaic and / or semiconductor industry, where for both applications semiconductors or semiconductor material are cut using a wire saw device. For example, wire saws cut semiconductor workpieces into shapes amenable to further processing, eg cutting silicon ingots into wafers, bricks or squares. [0003] For many applications, wafers or slices have extremely small thicknesses relative to the cross-section or diameter of the ingot. The wafer is thus flexible in nature and can flex and bend to make contact with adjacent slices. This deflec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/04
CPCB23D57/0053B23D57/003B23D59/001B28D5/0064B28D5/0076B28D5/045
Inventor A·米塔兹A·施密特C·O·布卢姆
Owner APPLIED MATERIALS INC