A Laser Interferometric Displacement Measuring System

Abstract

The invention discloses a laser interference displacement measuring system. Including lasers, polarizers, depolarizing beamsplitters, polarizing beamsplitters, 1 / 4 wave plates, corner cube mirrors, flat mirrors and photodetectors. When the measurement light is incident on the moving cube mirror, the optical path change of the light reflected back from the original path caused by the displacement of the cube mirror is four times that of the displacement of the cube mirror. In this design, the measurement light enters and exits the moving cube mirror twice in the same direction through the principle of polarization optics, realizing the eightfold relationship between the change in the optical path difference between the measuring light and the reference light and the displacement of the cube mirror, so as to realize the optical octave of the displacement. times subdivision measurement. The system has the advantages of high measurement resolution and accurate measurement results, convenient and simple structural installation, low price and wide application range.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and more specifically relates to a laser interference displacement measurement system, in particular to an ultra-precise laser interference displacement measurement system with optical eightfold subdivision. Background technique [0002] At present, with the rapid development of modern industry, displacement measurement has become very important, and such as the measurement of micro-deformation displacement of machine tools under load conditions, the measurement of the profile of precision optical components, etc., the requirements for displacement measurement speed and accuracy are very high. Common displacement measurements include mechanical, electronic, and geometric optics. Mechanical displacement measuring instruments such as vernier calipers have the disadvantages of low measurement accuracy and the measurement results are heavily dependent on labor. Inductive and capacitive pre...

AI Technical Summary

Problems solved by technology

However, the grating measurement device must always be close to the grating, which has very strict requirements on the position. Not only is it inconvenient to install and difficult to adjust, but the limitation of its position will also limit the performance parameters such as the movement stroke and movement accuracy of the working machine.

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