Unlock instant, AI-driven research and patent intelligence for your innovation.

Pressure sensor and method of making the same

A technology of pressure sensor and manufacturing method, which is applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, instruments, etc., and can solve problems such as complex structure and complex manufacturing process

Inactive Publication Date: 2017-04-19
DENSO CORP
View PDF11 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the above-mentioned pressure sensor, different components such as pins and terminals are used only to ensure the electrical path between the sensor chip and the external circuit, and there are problems such as complicated structure and complicated manufacturing process.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Pressure sensor and method of making the same
  • Pressure sensor and method of making the same
  • Pressure sensor and method of making the same

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0038] A first embodiment of the present application will be described with reference to the drawings. In addition, it is preferable that the pressure sensor of this embodiment is attached to, for example, a fuel pipe of a fuel injection system of a vehicle, and used to detect the pressure of the measurement medium in the fuel pipe.

[0039] like figure 1 As shown, the pressure sensor of this embodiment includes a stem 10 . The stem 10 is formed into a bottomed cylindrical shape having a hollow portion made of stainless steel such as SUS430, a thin-walled diaphragm 11 is formed through the substantially central portion of the bottom, and the other end portion on the opposite side to the diaphragm 11 is formed as Hollow opening 12 . Then, after the measurement medium is introduced from the opening 12 into the hollow portion, the diaphragm 11 deforms according to the pressure of the measurement medium.

[0040] Furthermore, between the diaphragm 11 and the opening 12 in the s...

no. 2 Embodiment approach

[0069] A second embodiment of the present application will be described. In the above-mentioned first embodiment, for figure 2 In the step (c), the example in which the molding resin is injected into the mold to form the mounting portion 44 , the bonding portion 45 , the sealing portion 46 , and the first and second protrusions 47 and 48 has been described. However, when the molding resin is poured into the mold and each of the members 44 to 48 is directly molded, the shape of the mold tends to become complicated, and the manufacturing process tends to become complicated.

[0070] That is, the parts 44 to 48 are formed by injecting molding resin into cavities (spaces) formed in the mold, but the mounting part 44 and the joint part 45 and the sealing part 46 and the first and second protruding parts 47 and 48 are formed. They are separated from each other, and their respective sizes (necessary amount of resin) are different. Therefore, as a mold, it is necessary to appropria...

no. 3 Embodiment approach

[0078] A third embodiment of the present application will be described. In this embodiment, compared with the first embodiment, the internal connection region 41 is directly disposed on the stem 10 , and other aspects are the same as those in the first embodiment, so descriptions thereof are omitted here.

[0079] like Figure 8 As shown in (a), in this embodiment, after the sensor chip 20 is mounted on the diaphragm 11 of the stem 10 , the lead frame 40 is directly arranged on the stem 10 . Specifically, the lead frame 40 is directly disposed on the stem 10 by bonding the other surface 41 b of the internal connection region 41 with an adhesive or the like around a portion of the stem 10 where the sensor chip 20 is disposed.

[0080] also, Figure 8 (a) to Figure 8 (c) represents a section along the lead frame 40, which is the same as image 3 (a) to image 3 (c) Different cross-sectional views, in which the sensor chip 20 is arranged on the stem 10 . Furthermore, the i...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A method for manufacturing a pressure sensor includes: preparing a stem which has a cylindrical shape with a bottom as a diaphragm; mounting a sensor chip on the diaphragm; preparing a conductive member, in which an internal connection region is integrated with an external connection region electrically connected to an external circuit by an outer frame; forming a first resin mold to couple the internal connection region to the external connection region; separating the outer frame from the internal connection region and the external connection region; arranging the internal connection region in the stem; and electrically connecting the sensor chip and the internal connection region through the first connection member.

Description

[0001] Cross-reference of related applications [0002] This application is based on Japanese application No. 2013-35878 filed on February 26, 2013, Japanese application No. 2013-251179 filed on December 4, 2013, and Japanese application No. 2014-011406 filed on January 24, 2014 and Japanese Application No. 2014-017919 filed on January 31, 2014, the contents of which are cited here. technical field [0003] The present application relates to a pressure sensor in which a sensor chip is arranged on a diaphragm of a stem and a method of manufacturing the same. Background technique [0004] Conventionally, as such a pressure sensor, for example, Patent Document 1 proposes the following pressure sensor. [0005] That is, in this pressure sensor, a sensor chip is mounted on the diaphragm of the stem, and the sensor chip is electrically connected to a ceramic substrate on which a predetermined process is arranged around the stem via a bonding wire. Also, the ceramic substrate is ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/00G01L19/14
CPCG01L9/0051G01L23/28Y10T29/49131
Inventor 谷田胜纪村田毅司藤本尚纪山田雅央
Owner DENSO CORP