Assembly device and installation method for linear or planar motor magnetic array

Abstract

The invention discloses a magnetic array assembly device, which is characterized in that it includes a bearing base plate, on which a magnet replacement block, a magnet positioning device, a magnetic pre-slot, a damping slider, a thrust adapter, a guide device and The thrust device, the magnet replacement block is used to locate the magnet positioning device, the magnet positioning device is used to locate the placement position of the magnet, the magnetic preset slot is used to place the magnet, and the damping slider is used to Eliminate the repulsion between the adjacent magnets, the damping slider and the magnetic pre-slot move along the guide device, the thrust device is used to move the thrust adapter to a predetermined position, the thrust transfer Connectors are installed between the magnet positioning devices, and several magnets are placed to form the magnetic array.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a planar motor magnetic array assembly device and an installation method thereof. Background technique [0002] In recent years, planar motors have become a research hotspot in the field of semiconductor industry, which is committed to researching smaller devices with more functions and lower prices. With the advancement of technology, photolithography systems develop and test extreme ultraviolet light sources. In order to prevent the pollution of optical components and the absorption of extreme ultraviolet light by air, silicon wafers are exposed in a vacuum environment. Shorter-wavelength light sources are used in lithography, enabling smaller features per chip. The lithography machine is required to run fast and stably. It is necessary to require the workpiece table to be small in mass, high in stiffness and low in interference, and to accurately posi...

AI Technical Summary

Problems solved by technology

There are several problems in this method: (1) It is difficult to uniformly match the tolerances between the multiple assembly holes on the mounting base and the copper pillars, and the aluminum base cannot accurately ensure the assembly position when assembling the magnetic poles; (2) the assembly fixture method As a result, the assembly efficiency is extremely low, and only 4 rows of magnetic pole arrays can be assembled every day; (3) The grinding process can only guarantee the surface mechanical flatness, but cannot guarantee the assembly flatness of the upper surface of the magnetic pole body

There are several problems with this method: (1) There is a layer of mounting base between the magnet and the back iron, and the forward magnetic density will decrease; (2) If the magnet array is closely arranged, the fixture in this solution is not suitable for use; (3) Glue flow The groove is not suitable for marking directly on the back iron, which will increase the positive flux density harmonics of the magnetic array

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