A multi-dimensional tunable carrier device that can be used in high-vacuum and ultra-high-temperature environments
A bearing device, ultra-high temperature technology, applied in measurement devices, instruments, scientific instruments, etc., can solve the problems of fragile sample table, non-reusable, large internal thermal stress, etc., achieve good chemical stability, reduce use costs , The effect of reducing the difficulty of processing
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specific Embodiment 1
[0068] Using ZrB 2 The test sample made of -20SiC ultra-high temperature ceramic composite material is ground and loaded in a high temperature resistant bracket, and the sample is adjusted so that the axis of the sample is on the same axis as the center hole of the bracket. Adjust the three-dimensional mobile platform so that the sample is in the required heating position. The vacuum pressure is controlled at 10Pa, and the induction heating source heats the sample to 1800°C. The surface temperature of the two-dimensional water-cooled mobile platform does not exceed 40°C, and it can realize three-dimensional movement with a movement accuracy of 0.1mm. The entire carrying device has a complete structure, good chemical stability, and does not generate any volatile gas.
specific Embodiment 2
[0070] Using ZrB 2 The test sample made of -20SiC ultra-high temperature ceramic composite material is ground and loaded in a high temperature resistant bracket, and the sample is adjusted so that the axis of the sample is on the same axis as the center hole of the bracket. Adjust the three-dimensional mobile platform so that the sample is in the required heating position. Control the vacuum pressure to 0.1Pa, and heat the sample to 1600°C with an electric heating source. The surface temperature of the two-dimensional water-cooled mobile platform does not exceed 40°C, and it can realize three-dimensional movement with a movement accuracy of 0.1mm. The entire carrying device has a complete structure, good chemical stability, and does not generate any volatile gas.
specific Embodiment 3
[0072] The test sample made of graphite is loaded in a high-temperature-resistant bracket after grinding, and the sample is adjusted so that the axis of the sample is on the same axis as the center hole of the bracket. Adjust the three-dimensional mobile platform so that the sample is in the required heating position. Control the vacuum pressure to 10 -3 Pa, heat the sample to 1400°C with an electric heating source. The surface temperature of the two-dimensional water-cooled mobile platform does not exceed 35°C, and it can realize three-dimensional movement with a movement accuracy of 0.1mm. The entire carrying device has a complete structure, good chemical stability, and does not generate any volatile gas.
[0073] Compared with the prior art, the upper end of the high-temperature-resistant bracket 2 in the embodiment of the present invention is in direct contact with the sample, while the inner wall is heated by radiation from the surface of the high-temperature sample, an...
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