A kind of surface modification method of magnesium alloy material
A surface modification, magnesium alloy technology, applied in metal processing, metal processing equipment, non-electric welding equipment, etc., can solve the problems of inability to achieve precise control, difficult surface coating, low stable temperature of magnesium alloy, etc., to achieve fast and efficient Metallurgical bonding, strong shape adaptability, and the effect of overcoming high vapor pressure
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[0015] The present invention takes titanium silicon nitrogen, which has the highest hardness among ceramic materials, as an example to describe its process parameters in detail.
[0016] Titanium nitride was deposited on a 0.15 mm thick double-glazed aluminum foil, and then titanium silicon nitride was deposited on the titanium nitride layer. The specific implementation process is as follows: before depositing the titanium nitride film on the aluminum foil, first remove the oxide layer on the surface of the aluminum foil; use the magnetron sputtering method for vapor deposition, and the vacuum is lower than 3×10 -3 Argon gas was introduced at Pa, and the background partial pressure during deposition was 6×10 -1 Pa, the deposition temperature is 350°C, the titanium nitride power is 200W, the silicon content in the titanium silicon nitrogen film is 8at.%, and the deposition speed is about 0.15nm / s. In the specific implementation process, in order to increase the bonding perform...
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