Application method of vacuum sputtering coated substrate clamping device

Abstract

The invention provides an application method of a vacuum sputtering coated substrate clamping device. According to the vacuum sputtering coated substrate clamping device, at least two beams are arranged on one side of a vertical beam; each beam is set into a cross shape; side beams are arranged on the two sides of each cross-shaped beam; two double-faced lower elastic clamps are symmetrically arranged on the upper face of the middle beam; the clamping heads of double-faced upper elastic clamps correspond to the clamping heads of the double-faced lower elastic clamps; and a single-faced substrate is arranged between single-sided upper elastic clamps and single-faced lower elastic clamps. When vacuum sputtering coating is conducted, a conveying trolley is started after the upper side of the single-faced substrate is symmetrically clamped by the two single-faced upper elastic clamps in an auxiliary manner, the vertical beam, the beams and a double-faced substrate are driven by the conveying trolley to enter a vacuum sputtering coating box so that spluttering coating can be conducted on the substrates. Single-faced or double-faced coating shares one clamping device, and universality is high; product type replacement is convenient and rapid; the substrates are rapidly assembled and disassembled by hands in a tool-free manner; the diffraction problem is solved, and low-resistance and high-grade products can be produced; and the structure is simple, machining is easy, the manufacturing cost is low, and permanent use is achieved.

Description

technical field [0001] The invention relates to ITO coating processing and production equipment for electronic products, in particular to a method for using a vacuum sputtering coating substrate clamping device. Background technique [0002] The existing ITO vacuum sputtering coating substrate clamping equipment has various forms, including mosaic type and open type. Open type, simple structure, convenient clamping of substrate, strong versatility, and low cost, but the quality of coating products is affected, and high-quality products cannot be produced; mosaic type, complex structure, slightly difficult to clamp substrate, product quality The convenience of clamping the substrate is guaranteed, but the versatility is poor. Each product needs to correspond to a set, which is expensive; no matter whether it is mosaic or open, the versatility of single-sided and double-sided coating is currently not achieved, and two Set clamping equipment; in view of the above reasons, the ...

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the mosaic type of the existing ITO vacuum sputtering coating substrate clamping equipment, the structure is complex, and the clamping substrate is slightly difficult. Single-sided and double-sided coating requires two sets of clamping equipment, and it is necessary to improve the mosaic type. The vacuum sputtering coating substrate clamping equipment provides a method of using the vacuum sputtering coating substrate clamping device through reasonable design. The specially designed beam is fixed to the vertical beam through the connecting piece, and the elastic clamp is connected to the beam through screws. On, single-sided products or double-sided products, fixed on the elastic clamp by hand; single-sided and double-sided products, the clamping equipment is compatible, and products of different specifications can be used as long as the beam is moved and re-fixed; the upper and lower stops of the beam Appropriate spacing between the chip and the substrate can prevent diffraction, and the production efficiency is high

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