A Modular Design Multifunctional Hot Stage Mechanism

A modular design, multi-functional technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problem of little reference value, failure to consider the connection elements of modular design, and failure to clearly and completely express the general modular design. Process and ideas, etc., to achieve the effect of facilitating standardized management, improving machining accuracy, and strong interactivity and interchangeability

Active Publication Date: 2017-09-19
SHANGHAI WEISONG IND AUTOMATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] (1) There is no abstract overview of the device's functions at a deep level, so that the function abstraction is separated from the concrete implementation;
[0005] (2) There is no clear and complete description of the general process and thinking of modular design, and there is little reference value;
[0006] (3) The problem of connection elements in the modular design is not considered, and the modification mechanism or replacement mechanism of a certain mechanism of the equipment is regarded as the whole of the modular design in a narrow sense.

Method used

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  • A Modular Design Multifunctional Hot Stage Mechanism
  • A Modular Design Multifunctional Hot Stage Mechanism
  • A Modular Design Multifunctional Hot Stage Mechanism

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] A multi-functional hot stage mechanism with modular design, its structure is as follows figure 1 As shown, the hot stage mechanism is set up sequentially from bottom to top:

[0045] Motion abutment 1, its structure is as figure 2 and image 3 As shown: it includes a fixed bottom plate 11, a θ-axis sliding table 12 arranged on the fixed bottom plate 11 and rotating in the θ direction around the z-axis, and a first loading platform 13 arranged on the θ-axis sliding table 12 sequentially from bottom to top , the second carrying platform 15 moving along the y-axis and the third carrying platform 18 moving along the x-axis, the first carrying platform 13 is provided with a first guide rail 161 along the x-axis direction, and a first L-shaped connecting block 171, The first micrometer knob 141 is arranged on the first L-shaped connecting block 171, the second loading platform 15 is arranged on the first guide rail 161 and is connected with the first micrometer knob 141, a...

Embodiment 2

[0052] A multi-functional heating stage mechanism with modular design, the heating stage mechanism is set up sequentially from bottom to top:

[0053] Motion abutment 1, its structure is as figure 2 and image 3 As shown: it includes a fixed bottom plate 11, a θ-axis sliding table 12 arranged on the fixed bottom plate 11 and rotating in the θ direction around the z-axis, and a first loading platform 13 arranged on the θ-axis sliding table 12 sequentially from bottom to top , the second carrying platform 15 moving along the y-axis and the third carrying platform 18 moving along the x-axis, the first carrying platform 13 is provided with a first guide rail 161 along the x-axis direction, and a first L-shaped connecting block 171, The first micrometer knob 141 is arranged on the first L-shaped connecting block 171, the second loading platform 15 is arranged on the first guide rail 161 and is connected with the first micrometer knob 141, and the second loading platform 15 is pro...

Embodiment 3

[0057] A multi-functional heating stage mechanism with modular design, the heating stage mechanism is set up sequentially from bottom to top:

[0058] Motion abutment 1, its structure is as figure 2 and image 3 As shown: it includes a fixed bottom plate 11, a θ-axis sliding table 12 arranged on the fixed bottom plate 11 and rotating in the θ direction around the z-axis, and a first loading platform 13 arranged on the θ-axis sliding table 12 sequentially from bottom to top , the second carrying platform 15 moving along the y-axis and the third carrying platform 18 moving along the x-axis, the first carrying platform 13 is provided with a first guide rail 161 along the x-axis direction, and a first L-shaped connecting block 171, The first micrometer knob 141 is arranged on the first L-shaped connecting block 171, the second loading platform 15 is arranged on the first guide rail 161 and is connected with the first micrometer knob 141, and the second loading platform 15 is pro...

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Abstract

The invention relates to a multifunctional heating platform mechanism with a modular design, comprising a moving base (1) and a jig (4) arranged on the moving base (1), on which a matched The workpiece, the moving base (1) includes a fixed base plate (11), a θ-axis slide table (12) that is arranged on the fixed base plate (11) and performs θ-rotational movement around the z-axis, and is sequentially arranged on the θ axis from bottom to top. The first carrying platform (13) on the shaft slide table (12), the second carrying platform (15) moving along the y-axis and the third carrying platform (18) moving along the x-axis; during work, adjust the θ-axis sliding platform (12), the second carrying platform (15) and the third carrying platform (18), move the jig (4) to the designated station, and process the workpiece on the jig. Compared with the prior art, the invention has the advantages of one machine with multiple functions, high processing precision and low manufacturing cost.

Description

technical field [0001] The invention relates to the field of high-end packaging equipment for semiconductors, in particular to a multifunctional heating stage mechanism with a modular design. Background technique [0002] The concept of modular design originated in the 1960s. Under the background of the rapid development of science and technology in the past 30 years, the theory of modular design has been continuously improved. With the rapid development of the national economy, the mechanical equipment in the basic manufacturing industry is developing towards the trend of small batch, multi-function and high precision. This changing trend leads to the fact that traditional design methods and concepts cannot meet the needs of modern enterprises for fast, efficient and economical products. Modular design is an effective method to save cost, improve efficiency and shorten production cycle, and the application of this design method will be more and more. Such as the aircraft ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/56
Inventor 刘劲松张金志谢旭波
Owner SHANGHAI WEISONG IND AUTOMATION
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