Detection system and method of coating membrane thickness

A detection system and detection method technology, applied in the field of detection, can solve the problems of product quality and yield improvement due to changes in confirmation time and process parameters, lag in film thickness inspection, etc., to achieve timely and rapid detection timeliness, monitoring stability, Responsive effect

Inactive Publication Date: 2015-12-02
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology

[0004] The purpose of the present invention is to provide a detection system and method for coating film thickness, aiming to solve the problem of hysteresis in film thickness inspection of THK optical measurement method in the prior art, while avoiding too long confirmation time and process parameters The impact of changes on product quality and yield improvement

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  • Detection system and method of coating membrane thickness
  • Detection system and method of coating membrane thickness
  • Detection system and method of coating membrane thickness

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Embodiment Construction

[0038] The word "embodiment" as used in this specification means serving as an example, instance or illustration. Furthermore, the article "a" as used in this specification and the appended claims may generally be construed to mean "one or more" unless specified otherwise or clear from context to refer to a singular form.

[0039] In the embodiment of the present invention, in order to avoid the hysteresis of coating film thickness measurement, a coating film thickness detection system of a non-contact micro-cantilever probe is designed to measure the change of film thickness in real time during the coating process , the system is directly erected on the linerguide on the side of the coating machine frame (Gantry), and can move laterally for measurement at the same time, and move to the back end of the coating nozzle (Nozzle) during real-time online measurement, the detection and coating of PR film thickness The cloth process is carried out synchronously, and the surface state...

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Abstract

Disclosed in the invention is a detection system of a coating membrane thickness. The system comprises a probe, a feedback circuit, a photoelectric detector, and a computer. The probe is used for scanning a PR membrane surface; the feedback circuit is used for controlling a scanning head to move at a vertical direction, so that the acting force between the probe and the PR membrane surface at each point is constant all the time during the scanning process; the photoelectric detector is used for converting a reflected laser beam into an electric pulse signal; and the computer is used for converting the electric pulse signal into an area that is either bright or dark to form original data of the PR membrane thickness. According to the invention, the measurement time is shorter; arrangement of a complex optical system is not required; the measurement and coating processes are carried out synchronously; real-time on-line measurement of the coating membrane thickness is realized; the coating membrane thickness can be controlled and adjusted in real time; and the system and method play a key role in realizing stability of the coating process monitoring.

Description

【Technical field】 [0001] The invention relates to the technical field of detection, in particular to a coating film thickness detection system and method. 【Background technique】 [0002] In the color film substrate coating process of TFT-LCD, the PR film thickness detection after coating by the coating machine is generally carried out by THK (ThicknessMeasure) optical measurement after vacuum drying and pre-baking process. There is a lag in the detection of cloth film thickness, and the occurrence of abnormal film thickness is usually not discovered in time. It takes a lot of time for confirmation and subsequent improvement work to reconfirm. With the market demand for high-precision and high-resolution products , the film thickness uniformity requirements on the color film substrate coating process are becoming more and more stringent, and the real-time monitoring of the coating film thickness Matrix distribution has become more important. There are certain disadvantages i...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/06
Inventor 吴利峰李启明徐海乐丁鹏徐先华熊燕军
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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