High-accuracy laser large-working-distance auto-collimation device and method

A working distance and high-precision technology, which is applied in the field of high-precision laser large working distance self-collimation device, can solve the problems that the reflected beam deviates from the entrance pupil, the range cannot be too large, and the self-collimation and micro-angle measurement cannot be realized.

Active Publication Date: 2016-10-12
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the la

Method used

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  • High-accuracy laser large-working-distance auto-collimation device and method
  • High-accuracy laser large-working-distance auto-collimation device and method
  • High-accuracy laser large-working-distance auto-collimation device and method

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specific Embodiment 1

[0075] This embodiment is an embodiment of a high-precision laser autocollimation device with a large working distance.

[0076] The high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

[0077] The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beamsplitter 61 and an image sen...

specific Embodiment 2

[0080] This embodiment is an embodiment of a high-precision laser autocollimation device with a large working distance.

[0081] The high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 7 shown. On the basis of the specific embodiment 1, the high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0082] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3...

specific Embodiment 3

[0084] This embodiment is an embodiment of a high-precision laser autocollimation device with a large working distance.

[0085] The high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 8 shown. On the basis of the specific embodiment 1, the high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0086] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the re...

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Abstract

The invention belongs to the technical field of precise measuring and the field of optical engineering, and particularly relates to a high-accuracy laser large-working-distance auto-collimation device and method. The device is composed of a laser source, a collimation lens, a reflector and a feedback imaging system. The method includes the steps that the reflector is adjusted, a reflected laser beam returns to the center of the image surface of the feedback imaging system, and then angle changes of the surface of a measured object are obtained through an angle deflection measuring device on the reflector. As the reflector is additionally arranged on a traditional auto-collimation angle measuring system, the problem that as lasers reflected by a measured object deviate from the measuring system, measuring can not be carried out is solved, and then the technical advantage that the auto-collimation working range is expanded with the same working distance or the working distance is increased within the same auto-collimation working range is achieved; in addition, due to the specific design of the collimation lens, the feedback imaging system, the reflector and the like, the device and method have the advantages that the structure is simple, the manufacturing cost is low, the stability of the measuring environment can be monitored, and rapid measuring can be achieved.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and specifically relates to a high-precision laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01C15/00
CPCG01B11/26G01C15/002
Inventor 谭欣然朱凡王超谭久彬
Owner HARBIN INST OF TECH
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