High-accuracy laser large-working-distance auto-collimation device and method

Abstract

The invention belongs to the technical field of precise measuring and the field of optical engineering, and particularly relates to a high-accuracy laser large-working-distance auto-collimation device and method. The device is composed of a laser source, a collimation lens, a reflector and a feedback imaging system. The method includes the steps that the reflector is adjusted, a reflected laser beam returns to the center of the image surface of the feedback imaging system, and then angle changes of the surface of a measured object are obtained through an angle deflection measuring device on the reflector. As the reflector is additionally arranged on a traditional auto-collimation angle measuring system, the problem that as lasers reflected by a measured object deviate from the measuring system, measuring can not be carried out is solved, and then the technical advantage that the auto-collimation working range is expanded with the same working distance or the working distance is increased within the same auto-collimation working range is achieved; in addition, due to the specific design of the collimation lens, the feedback imaging system, the reflector and the like, the device and method have the advantages that the structure is simple, the manufacturing cost is low, the stability of the measuring environment can be monitored, and rapid measuring can be achieved.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and specifically relates to a high-precision laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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