A portable combined zero setting high precision laser large working distance auto-collimation device and method

A portable, high-precision technology, used in precision measurement and optical engineering, it can solve the problems of inability to achieve self-collimation and micro-angle measurement, the range cannot be too large, and the reflected beam deviates from the entrance pupil.

Active Publication Date: 2016-12-14
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the la

Method used

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  • A portable combined zero setting high precision laser large working distance auto-collimation device and method
  • A portable combined zero setting high precision laser large working distance auto-collimation device and method
  • A portable combined zero setting high precision laser large working distance auto-collimation device and method

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specific Embodiment 1

[0086]This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

[0087] The portable combined zero-adjustment high-precision laser large working distance self-collimation device of this embodiment has a structural schematic diagram as figure 2 shown. The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

[0088] The feedback imaging system 6 includes an ima...

specific Embodiment 2

[0095] This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

[0096] The portable combined zero-setting high-precision laser large working distance self-collimation device of this embodiment is different from the specific embodiment 1 in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 of the present embodiment is the following two forms: A sort of:

[0097] First, the feedback imaging system 6 includes a first feedback beam splitter 61, and an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, such as Figure 8 Shown; Described guide rail 68 has two stop positions altogether, and a stop position makes image sensor 65 image plane centers correspond to the focus position of reflective collimating mirror 22, and another stop position makes four-quadrant detector 66 image plane centers correspond to reflective The focus posit...

specific Embodiment 3

[0099] This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

[0100] The portable combined zero-adjustment high-precision laser large working distance self-collimation device of this embodiment has a structural schematic diagram as Figure 10 shown. On the basis of the specific embodiment 1, the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0101] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefr...

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Abstract

The invention relates to the field of precision measurement technology and the field of optical engineering and in particular relates to a portable combined zero setting high precision laser large working distance auto-collimation device and method. The device comprises a light source, a collimating mirror, a reflector, and a feedback imaging system. The method makes reflected light beams return to the image plane center of the feedback imaging system by adjusting the reflector and obtains the angle change of the surface of a measured object by means of an angle deflection measuring device on the reflector. The reflector is added to a conventional auto-collimation angle measuring system, so that the problem that measurement is impossible because reflected light of a measured object deviates from the measuring system is solved and the auto-collimation working range is increased on the condition of the same working distance or the working distance is increased on the condition of the same working range. Owing to the specific design of the collimating mirror, the feedback imaging system and the reflector, the device is small, portable, and high in measurement precision, can monitor the stability of measurement environments, and can perform measurement rapidly.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to a portable combined zeroing high-precision laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few ...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01C15/00G02B27/30
CPCG01B11/26G01C15/002G02B27/30
Inventor 谭欣然于洋石剑王超谭久彬
Owner HARBIN INST OF TECH
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