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A stripping liquid supply system

A technology for supplying system and stripping liquid, applied in optics, instruments, opto-mechanical equipment, etc., can solve problems such as cost reduction, unfavorable unified management of chemical liquid, increase investment, etc., to reduce the amount of use, improve product operation uniformity, The effect of reducing equipment investment

Active Publication Date: 2017-12-26
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the liquid medicine supply system of the common peeling machine is not conducive to the unified management of the medicine liquid and the cost reduction
In addition, since each peeling machine independently controls the use of the chemical solution, the investment in equipment such as pumps and filters for each machine is increased.

Method used

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  • A stripping liquid supply system
  • A stripping liquid supply system
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Embodiment Construction

[0025] The implementation of the present invention will be described in detail below in conjunction with the accompanying drawings and examples, so as to fully understand and implement the process of how to apply technical means to solve technical problems and achieve technical effects in the present invention. It should be noted that, as long as there is no conflict, each embodiment and each feature in each embodiment of the present invention can be combined with each other, and the formed technical solutions are all within the protection scope of the present invention.

[0026] Such as figure 1 Shown is a general semiconductor / TFT manufacturing process flow chart in the prior art. Such as figure 1 As shown, in the general semiconductor / TFT manufacturing process, 4 to 5 photomask processes are used to form the required circuit patterns successively. Corresponding to each photomask process, several steps of cleaning, film formation, yellow light, etching and stripping must b...

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Abstract

The invention discloses a stripping liquid supply system. The system comprises a plurality of drug tanks used for containing stripping liquid and a plurality of stripping equipment units used for receiving the stripping liquid supplied by the drug tanks and performing stripping processing of stripped materials, the grouping of the plurality of stripping equipment units is performed based on a predetermined principle, and the stripping equipment units in the same group after grouping are connected to the same drug tank. According to the system, the usage quantity of the drug tanks can be reduced, the equipment hardware structure can be simplified, the equipment investment is reduced, unified management of drug liquid is facilitated, the uniformity of product operation caused by the drug liquid is improved, and photoresistance residue due to impurities in the stripping liquid can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing and processing, in particular to a stripping liquid supply system. Background technique [0002] In the general TFT manufacturing process, 4 to 5 photomask processes are used to form the required circuit pattern successively, and stripping operation is almost required for each process. Stripping is usually done with a stripping machine. The chemical liquid supply of the chemical liquid storage tank in the peeling machine is generally realized by the chemical central supply system CCSS. After the supply of the liquid medicine is completed, the liquid medicine is pumped from the liquid medicine storage tank with a pump, filtered through the filter, and supplied to the spray system of each stripping equipment unit, and the liquid medicine is sprayed on the substrate to dissolve and remove the photoresist. [0003] At present, the liquid medicine supply system of the common peeli...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/02H01L21/3105G03F7/42
CPCG03F7/42G03F7/422H01L21/02H01L21/31058
Inventor 杜海波
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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