A detection application method of fluorine-containing gas infrared spectrum

Abstract

The invention discloses a gas pond for fluorine-containing gas infrared spectroscopic analysis and an application of the gas pond to fluorine-containing gas analysis detection. The gas pond comprises a base, a pond body, pond windows and a temperature and pressure digital display controller. The base is located at the bottom of the pond body, and the pond body is erected on the base. The temperature and pressure digital display controller integrates a heater, a temperature sensor and a pressure sensor and is used for controlling the temperature and the pressure inside the pond body. The two ends of the pond body are each provided with a port. The pond windows are connected with the ports in the two ends of the pond body in a sealed mode respectively. The gas pond is good in corrosion resistance, high in sealing performance and good in safety performance, the quantity of residues and the amount of pollution are small, the service life of window plates is long, operation is convenient and rapid, and sampling and detecting can be more stably and more accurately carried out. The invention further provides the application of the gas pond to fluorine-containing gas analysis detection. The gas pond is mainly used for infrared spectroscopic analysis of a fluorine-containing gas sample or a volatile fluorine-containing liquid sample such as WF6, SF6, NF3 and HF.

Description

technical field [0001] The invention relates to the field of infrared spectrum detection, in particular to an application method for infrared spectrum detection of fluorine-containing gas. Background technique [0002] At present, the existing infrared spectroscopic gas cell, such as figure 1 As shown, it is often used to detect conventional fluorine-free gas samples, but it is difficult to achieve stable and accurate detection of fluorine-containing gas samples that are prone to phase change stratification or condensation. This is because most fluorine-containing gas samples or volatile fluorine-containing liquid samples such as WF 6 , SF 6 、NF 3 , HF, etc. are toxic, harmful, highly corrosive, and easy to condense or adsorb. However, the existing gas pools have low standards for sealing, which may easily cause leakage of toxic and harmful gases. However, if the sample to be tested has the characteristics of easy condensation or adsorption, after use, the existing gas c...

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Problems solved by technology

[0005] In view of the weak corrosion resistance of the gas pool in the prior art, the unstable adsorption and desorption of gas on the inner wall of the gas pool, the inability to accurately judge the temperature and pressure of the sample detection, and the easy pollution or damage of the window, the present invention provides a corrosion-resistant, sealed A gas cell for infrared analysis with good performance, less residue and pollution, long service life of windows, convenient and quick operation, more stable and accurate sampling and detection, and its application in the analysis and detection of fluorine-containing gases

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