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Device and method for depositing nano-coatings based on air extraction method

A nano-coating and deposition device technology, which is applied in the field of nano-particle evaporation and deposition devices, can solve the problems of changing the properties of the original particles, and achieve the effects of convenient operation, uniform deposition, and simple structure

Inactive Publication Date: 2015-12-16
TSINGHUA UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

Existing methods include adding reagents or applying an electric field, but these methods only work on certain nanoparticles and will change the properties of the original particles

Method used

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  • Device and method for depositing nano-coatings based on air extraction method

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Embodiment Construction

[0014] The specific structure, principle and working process of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0015] The device provided by the present invention includes that the device includes a stable base 1, a temperature control platform 2, a conduit adjustment mechanism, a buffer platform 6 and an air extraction system; the conduit adjustment mechanism and the temperature control platform 2 are arranged on the stable base 1; the described The pumping system of the present invention comprises a pumping pipe 12, a pumping buffer chamber 4, a connecting short pipe 10, an air guide pipe 9, a vacuum pump 8 and a governor 7; the pumping buffer chamber 4 is arranged on the pumping pipe 12, and the pumping buffer chamber 4 passes through The connecting short pipe 10 and the air guide pipe 9 are connected with the vacuum pump 8, and the vacuum pump 8 and the governor 7 are fixed on the buffer platform 6.

[0016] figure...

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Abstract

The invention discloses a device and a method for depositing nano-coatings based on an air extraction method. The device and the method are used for obtaining uniform nano-coatings. The device comprises a stable base, a temperature control platform, a buffering platform and an air extraction system, wherein the temperature control platform is arranged on the stable base; a substrate is arranged on the temperature control platform; the air extraction system comprises an air extraction pipe, an air extraction buffering cavity, an air guide pipe, a vacuum pump and a speed regulator. The device is simple in structure and convenient to operate; the device and the method are technically characterized in that the inner flowing directions of liquid droplets are changed in the evaporation process through a method for extracting air from the upper part of the substrate; the nanoparticles in the liquid droplets on the walls can move to the edges, so that the coffee ring phenomenon can be eliminated, and the particles can uniformly deposited.

Description

technical field [0001] The invention relates to a device for realizing the vapor deposition of nanometer particles by using an air pumping method, so as to obtain a more uniform coating of nanometer particles. Background technique [0002] The nanoparticle in the solution is deposited on the solid substrate by the method of droplet evaporation precipitation, which has a wide range of applications in the fields of printing, liquid crystal, coating, biological self-assembly and microarray. But when the solution evaporates naturally, the thickness of the deposited particles is not uniform, and the concentration of the deposited particles at the edge of the droplet is much higher than that in the middle area, which is the famous "coffee ring" effect. The reason is that the fluid inside the droplet flows toward the edge during the evaporation process, bringing most of the particles to the edge of the droplet and being pinned, resulting in a ring configuration with a much higher p...

Claims

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Application Information

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IPC IPC(8): C23C24/08
CPCC23C24/082
Inventor 杨权三郝鹏飞何枫
Owner TSINGHUA UNIV